Effect of substrate temperature on gold-catalyzed silicon nanostructures growth by hot-wire chemical vapor deposition (HWCVD)

Chong, Su Kong; Goh, Boon Tong; Aspanut, Zarina; Muhamad, Muhamad Rasat; Dee, Chang Fu; Rahman, Saadah Abdul

doi:10.1016/j.apsusc.2010.11.012

Cited by 16 publications

(12 citation statements)

References 31 publications

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“…The absorption bands corresponding to the SieH x and SieO x related vibration modes are indicated in the figure. SieH x related vibrational bands [47], such as SieH wagging (w630 cm À1 ), SieH x (x ¼ 1, 2 and 3) bending (845e910 cm À1 ), SieH (2000 cm À1 ) and SieH 2 (2100 cm À1 ) stretching only appeared at T f of 1500 C and above. This indicates that low SiH 4 decomposition efficiency for deposition at T f below 1500 C results in the growth of only the worm-like structures and the In catalyst being covered with a layer of Si deposits instead of SiNWs.…”

Section: Fourier Transform Infraredmentioning

confidence: 97%

Study on the role of filament temperature on growth of indium-catalyzed silicon nanowires by the hot-wire chemical vapor deposition technique

Chong

Goh

Dee

et al. 2012

Materials Chemistry and Physics

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Section: Fourier Transform Infraredmentioning

confidence: 97%

Study on the role of filament temperature on growth of indium-catalyzed silicon nanowires by the hot-wire chemical vapor deposition technique

Chong

Goh

Dee

et al. 2012

Materials Chemistry and Physics

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“…Actualmente ha crecido el interés por la fabricación y caracterización de nanoestructuras de silicio, entre las que se incluye nanohilos, pilares, tubos, conos y partículas, estas se han estudiado ampliamente debido a sus propiedades físicas y aplicacioneś unicas en el desarrollo nanoelectrónico, nanofotónico, fotovoltaico y optoelectrónico [14,15]. Aunado a esto se ha trabajado la elaboración de múltiples dispositivos como baterías, paneles solares, detectores, sistemas termoeléctricos, sensores químico-biológicos, microfluidos, etc., que utilizan dichas estructuras de silicio [16].…”

Section: Uso Y Diseño De Las Nanoestructuras De Silicio (Nesis)unclassified

“…Al analizar las técnicas de deposición, cabe mencionar que la deposición de vapor químico de alambre caliente (DVQAC), conocida como una de las nuevas técnicas para la deposición de nanoestructuras de silicio, ha recibido considerable atención para la deposición de materiales de película delgada basados en Si desde el cambio de siglo. En esta se logra una alta uniformidad en las películas de nanoestructuras de silicio que son depositadas [14].…”

Section: Uso Y Diseño De Las Nanoestructuras De Silicio (Nesis)unclassified

Nanoestructuras De Silicio en Biomedicina Y Biotecnología

Rios¹,

Vega-Baudrit

Villegas³

et al. 2020

Momento

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Silicon nanostructures have properties that make them appealing for applications in biomedicine and biotechnology. The fabrication and characterization of silicon nanostructures are currently gaining a lot of attention and they can include nano-wires, whiskers, pillars, tubes, cones, particles, etc. There are several methods to assist the generation of these nanostructures like laser ablation, thermal evaporation decomposition, and chemical vapor deposition, among others. We consider they are highly potential tools for the improving of diagnosis techniques and the treatment of important biological conditions. The objective of this review is to summarize the main aspects of the physicochemical design of silicon nanomaterials, in addition to toxicological considerations regarding biocompatibility, biodistribution and cell dynamics. Finally, we emphasis on important biomedical applications, such as gene therapy, drug delivery, imaging and sensoring.

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“…Moreover, a sharp Raman peak at 500 cm -1 for SiNWs synthesized by PECVD at 400 °C with diameters ranging from 40 nm to 9 400 nm was also observed [14]. The crystallite size D r , can be estimated, depending on the value of the shift in TO phonon mode [42]:…”

Section: Raman Spectramentioning

confidence: 99%

Structural and optical properties of Au-catalyzed SiNWs grown using pulsed plasma-enhanced chemical vapour deposition

Al-Taay

Mahdi²,

Parlevliet

et al. 2013

Superlattices and Microstructures

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This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. AbstractSilicon nanowires (SiNWs) were grown on indium tin oxide-coated glass substrates using pulsed plasma-enhanced chemical vapour deposition (PPECVD) with gold (Au) as a catalyst.Various thicknesses of Au thin films ranging from 10 nm to 100 nm were deposited on the substrates by thermal evaporation. The surface morphological study of the prepared wires showed that the wire diameter increased as the catalyst film thickness increased. The X-ray diffraction patterns of the prepared SiNWs illustrated that the grown wires had cubic phase, and the crystallinity was enhanced as the catalyst thickness increased. The photoluminescence spectra of the SiNWs had a red emission band whose band location and shape were found to be dependent on catalyst thickness. The Raman spectra of the prepared nanowires showed that the first order transverse band shifted toward lower frequencies compared with the c-Si band location. The first order transverse band approached the c-Si band location as the wire diameter increased due to the increasing catalyst film thickness.

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Effect of substrate temperature on gold-catalyzed silicon nanostructures growth by hot-wire chemical vapor deposition (HWCVD)

Cited by 16 publications

References 31 publications

Study on the role of filament temperature on growth of indium-catalyzed silicon nanowires by the hot-wire chemical vapor deposition technique

Study on the role of filament temperature on growth of indium-catalyzed silicon nanowires by the hot-wire chemical vapor deposition technique

Nanoestructuras De Silicio en Biomedicina Y Biotecnología

Structural and optical properties of Au-catalyzed SiNWs grown using pulsed plasma-enhanced chemical vapour deposition

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