Effect of substrate type on structure of TiO2 thin film deposited by atomic layer deposition technique

Abstract

This paper discusses about the effect of substrate type on structure of titanium dioxide thin film deposited by atomic layer deposition technique using titanium tetrachloride and deionized water as precursors. The substrates investigated are silicon (100), cover glass and titanium, and the depositions were performed at temperatures ranging from 300ºC to 450 ºC. We observed through Rutherford backscattering spectrometry that the TiO2 thin films grown on both substrates are stoichiometric. Grazing incidence x-ray diffraction showed that rutile phase could be obtained in almost pure phase at temperature of 450 ºC, however only for glass and titanium substrates. For the case of silicon (100) substrate, the anatase phase was preponderant for process temperatures investigated.

Enhancing Carbon Fiber Fabrics with ALD AlxOy Coatings: An Investigation of Thickness Effects on Weight, Morphology, Coloration, and Thermal Properties

“…The ALD of metal oxide thin films yields varying results across different substrates, as demonstrated in our research on ALD TiO2 [20]. This observation holds true for Al2O3 deposited on both planar silicon and CFFs.…”

Structural, optical, and electrical properties of TiO2 thin films deposited by ALD: Impact of the substrate, the deposited thickness and the deposition temperature

“…2 (a) shows a typical RBS spectrum corresponding to the 1000-cycles film deposited at 200 • C along with and the fit curve. It exhibits well-defined peaks of Ti and O above the Si wafer contribution [8,66] and no carbon is detected. The fitting of the experimental data indicates that TiO 2 films deposited at all T D are stoichiometric.…”

Antibacterial properties of TiO2 nano coating on food packaging surfaces against Escherichia coli and Salmonella typhimurium

“…The GIXRD patterns of the four coated substrates exhibited two prominent peaks at 24.9° and 47.1°, which corresponded to the (101) and (200) planes of anatase TiO 2 [24,25]. In contrast, these two peaks were not detected in the uncoated substrates (Figure 3(a and b)).…”