“…Because of its abundance in nature and exceptional electrical and optical properties, it has wide a range of applications in electronic and optoelectronic devices such as solar cell window, surface acoustic wave devices and gas sensing applications [5][6][7][8][9] . ZnO thin film is more appropriate for gas sensing applications because of its high surface to volume ratio, allowing adsorption of more gas for surface reactions [10][11][12][13][14][15][16][17][18][19][20][21][22] .Swift heavy ion irradiation (SHI) has created interest among the researchers as a tool for modifying the structural, electrical, and optical properties of materials, thereby greatly improving device efficiency [23][24][25][26] . Ion beam irradiation does not change the chemical composition of the material, but it does create structural defects that affect the concentration of adsorption canters and the capacity of adsorption on the material surface.…”