“…The study of fluid flow and heat transfer in microsystems requires taking into account the effect of rarefaction, which appears when the number of Knudsen, which is the ratio of the mean free path to the hydraulic diameter, is between 10 −3 and 10 −1 . The first-order temperature-jump boundary condition [ 41 , 42 , 43 , 44 , 45 ] is widely used to solve the heat equation: where T w is the wall temperature, is the energy accommodation coefficient, γ is the ratio of the specific heat capacities, is the Prandtl number, Λ is the mean free path, and is the temperature gradient normal to the surface.…”