Effect of ternary compound on HfO2-Al2O3 mixture coatings revealed by solid-state NMR and TOF-SIMS

Wen, Jiahui; Ke, Liang; Ren, Jinjun; Shao, Jianda; Zhu, Meiping

doi:10.1016/j.mssp.2024.108785

Materials Science in Semiconductor Processing

2024

DOI: 10.1016/j.mssp.2024.108785

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Effect of ternary compound on HfO2-Al2O3 mixture coatings revealed by solid-state NMR and TOF-SIMS

Jiahui Wen,

Liang Ke,

Jinjun Ren

et al.

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Effect of ternary compound on HfO2-Al2O3 mixture coatings revealed by solid-state NMR and TOF-SIMS

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References 33 publications

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