2010
DOI: 10.1515/znb-2010-0111
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Effect of the Analytic Regions on the Quality Trend of Diamond-like/Graphitic Carbon Ratios in Raman Spectra

Abstract: Raman spectroscopy is a useful and non-destructive tool for the structural characterization of diamond-like carbon (DLC) films. Even though Raman spectroscopy is not a quantitative technique, the area integral intensity ratio of D and G peaks (ID/IG) derived by the fitting of separate Gaussian curves usually serves as an indicator of the quality trend of diamond-like material. However, conflicting reports still exist on the diamond-like films analyzed by the fitting method of Raman spectra. In this work we sho… Show more

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Cited by 11 publications
(7 citation statements)
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“…However, based on the present data, the uncertainty of the equation using the area ratio is greater than that using the height ratio (Table S1). As a possible reason, it is conceivable that it is difficult to determine the integrated boundary condition because the distance between the Fermi diad split and hot band is too close . In order to verify the significance of the height ratio, multiple regression analysis was performed using the area ratio in the same way as the calculation method shown below.…”
Section: Resultsmentioning
confidence: 99%
“…However, based on the present data, the uncertainty of the equation using the area ratio is greater than that using the height ratio (Table S1). As a possible reason, it is conceivable that it is difficult to determine the integrated boundary condition because the distance between the Fermi diad split and hot band is too close . In order to verify the significance of the height ratio, multiple regression analysis was performed using the area ratio in the same way as the calculation method shown below.…”
Section: Resultsmentioning
confidence: 99%
“…The main peak heights were used to determine the D-to-G band intensity ratios ( I D / I G ). This methodology was selected, as opposed to using the area ratios, to avoid arbitrary assignment of the limits for the integral function and the associated statistically larger standard deviations, as found and reported previously . A localized Gaussian peak-fitting methodology using Origin software was utilized to find both the absolute heights and wavenumber positions of D and G bands.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Thus, all three spectra confirmed the presence of DLC structure on the silicon substrate. The intensity ratio of the two peaks ( I D / I G ) was directly related to the sp 2 /sp 3 ratio and has been widely used for the qualitative estimation of the changes in the sp 2 /sp 3 ratio 32–34 . With the incorporation of the oxygen and fluorine atoms on the surface of the Si‐DLC coatings, the G peak position shifted to higher wavenumber values, from 1482 cm −1 of untreated Si‐DLC to 1498 and 1493 cm −1 , respectively.…”
Section: Resultsmentioning
confidence: 99%
“…The intensity ratio of the two peaks (I D /I G ) was directly related to the sp 2 /sp 3 ratio and has been widely used for the qualitative estimation of the changes in the sp 2 /sp 3 ratio. [32][33][34] With the incorporation of the oxygen and fluorine atoms on the surface of the Si-DLC coatings, the G peak position shifted to higher wavenumber values, from 1482 cm −1 of untreated Si-DLC to 1498 and 1493 cm −1 , respectively. At the same time, the I D /I G ratio increased from .27 to .71 and .72 for O-Si-DLC and F-Si-DLC.…”
Section: F I G U R E 2 Afm Images Of (A) Si-dlc (B) O-si-dlc and (C)mentioning
confidence: 99%