Effect of the filament discharge current on the microstructure and performance of plasma-enhanced magnetron sputtered TiN coatings

Zhang, Xin; Zhou, Yanwen; Gao, Jianbo; Zhao, Zhiwei; Guo, Yuanyuan; Xie, Zhiwen; Kelly, Peter

doi:10.1016/j.jallcom.2017.05.037

Cited by 16 publications

(2 citation statements)

References 20 publications

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“…Plasma-enhanced magnetron sputtering (PEMS) is a method to improve magnetron sputtering technology using the plasma enhancement effect [ 233 , 234 , 235 ]. In the traditional magnetron sputtering process, the surface of the sputtering target is bombarded with ions, resulting in the shedding of the sputtering material.…”

Section: Surface Modification Methodsmentioning

confidence: 99%

Tribocorrosion and Surface Protection Technology of Titanium Alloys: A Review

Li,

Zhou,

2023

Materials

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Titanium alloy has the advantages of high specific strength, good corrosion resistance, and biocompatibility and is widely used in marine equipment, biomedicine, aerospace, and other fields. However, the application of titanium alloy in special working conditions shows some shortcomings, such as low hardness and poor wear resistance, which seriously affect the long life and safe and reliable service of the structural parts. Tribocorrosion has been one of the research hotspots in the field of tribology in recent years, and it is one of the essential factors affecting the application of passivated metal in corrosive environments. In this work, the characteristics of the marine and human environments and their critical tribological problems are analyzed, and the research connotation of tribocorrosion of titanium alloy is expounded. The research status of surface protection technology for titanium alloy in marine and biological environments is reviewed, and the development direction and trends in surface engineering of titanium alloy are prospected.

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Section: Surface Modification Methodsmentioning

confidence: 99%

Tribocorrosion and Surface Protection Technology of Titanium Alloys: A Review

Li,

Zhou,

2023

Materials

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“…CrWN coatings having different W contents were synthesized by PEMS [21]. Pure W (99.9%) and Cr (99.6%) were used as sputtering targets.…”

Section: Methodsmentioning

confidence: 99%

Thermal Stability of CrWN Glass Molding Coatings after Vacuum Annealing

Huang

Xie

et al. 2020

Coatings

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CrWN glass molding coatings were deposited by plasma enhanced magnetron sputtering (PEMS). The microstructure and thermal stability of these coatings were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscope, transmission electron microscope, atomic force microscope and nanoindentation tests. The as-deposited coating exhibited an aggravated lattice expansion resulting in a constant hardness enhancement. The vacuum annealing induced surface coarsening and the spinodal decomposition of the coating accompanied by the formation of nm-sized c-CrN, c-W 2 N, and h-WN domains. The annealed coating with low W content had mainly a face-centered cubic (f.c.c) matrix, strain fields caused by lattice mismatch caused hardness enhancement. Following an increase in W content, the annealed coating showed a mixed face-centered cubic (f.c.c) and hexagonal close-packed (h.c.p) matrix. The large volume fraction of h-WN phases seriously weakened the coating strengthening effect and caused an obvious drop in hardness.Coatings 2020, 10, 198 2 of 11 manufacturing due to their excellent anti-sticking and anti-oxidation properties [10][11][12], but they are also expensive for their wide industrial applications. Diamond-like carbon (DLC) films exhibit good self-lubrication and anti-wear performance, however, their poor thermal stability greatly limits any molding application [13,14]. Recently, the application of transition metal nitride coatings to glass molding has received great interest due to the favorable chemical inertness and anti-wear properties of these materials [15][16][17][18]. Most current studies focus on the anti-sticking and anti-oxidation properties of transition metal nitride coatings. WCrN coatings have been reported to have good anti-sticking properties at 400 • C, but also exhibited poor anti-sticking performances at 500 • C due to the formation of oxides [19]. CrWN coatings have been reported to experience severe mechanical degradation and coarsening in high temperature nitrogen atmosphere due to the formation of WO 3 phases [20].The life of glass molding coatings is determined mainly by their anti-sticking and anti-oxidation properties, as well as by their thermal stability. However, relatively little work has been published on the thermal stability of this type of coatings. In this study, CrWN coatings with different W contents are synthesized using PEMS. Detailed characterizations of these coatings were performed to study the evolution of their microstructures, as well as the mechanical properties of the as-deposited coatings after vacuum annealing. The potential effect of the W content on the thermal stability of the annealed coatings will be discussed systematically in the following sections.

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Surface modification of 316L stainless steel by diamond-like carbon films

Zhang

et al. 2020

J. Iron Steel Res. Int.

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Effect of the filament discharge current on the microstructure and performance of plasma-enhanced magnetron sputtered TiN coatings

Cited by 16 publications

References 20 publications

Tribocorrosion and Surface Protection Technology of Titanium Alloys: A Review

Tribocorrosion and Surface Protection Technology of Titanium Alloys: A Review

Thermal Stability of CrWN Glass Molding Coatings after Vacuum Annealing

Surface modification of 316L stainless steel by diamond-like carbon films

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