Effect of the film thickness on pumping properties of Ti–Zr–V coating

Gao, Yong; Malyshev, O.B.; Valizadeh, Reza; Hu, Yue; Hannah, Adrian; Jie, Wang; Zhang, Jing; Xie, Yupeng; Sun, Qiming; You, Zhiming; Si, Qingyu; Sheng, Wang

doi:10.1016/j.nima.2022.166474

Cited by 7 publications

(3 citation statements)

References 29 publications

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“…The errors of sticking probabilities were earlier analysed in refs. [37,44], and showed more than a factor 2 for α = 10 −4 , 30%-50% for α = 10 −3 , 10%-20% for α = 10 −2 -0.1 for a RGA accuracy of 10%-20%. The sticking probabilities for Samples 2 and 3 were firstly measured at the end of each run, and once the ESD yield measurements for all the selected temperatures were done, the sticking probabilities were measured again after activated at each selected temperature to verify the accuracy of the sticking probabilities measured and calculated before.…”

Section: Resultsmentioning

confidence: 98%

“…The samples were studied initially after baking to 80 • C, then in the following runs after baking/activation to 120, 140, 180 and 250 • C. Sticking probabilities were measured and calculated following the procedure and method described in refs. [31,37,41], and the results for H 2 , CO and CO 2 initial sticking probabilities for Samples 2 and 3 are shown in table 2. The errors of sticking probabilities were earlier analysed in refs.…”

Section: Resultsmentioning

confidence: 99%

“…The Ti-Zr-V NEG coating pumping properties (such as H 2 and CO initial sticking probability and CO sorption capacity) have been reported in ref. [37].…”

Section: Introductionmentioning

confidence: 99%

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Effect of the film thickness on electron stimulated desorption yield from Ti-Zr-V coating

Gao¹,

Malyshev²,

Valizadeh³

et al. 2022

J. Inst.

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With the benefits of evenly distributed pumping, low thermal outgassing rate and low photon-/electron-/ion stimulated desorption yields, non-evaporable getter (NEG) coating has been widely used in particle accelerators for many years. Our earlier work has demonstrated the different thickness of Ti-Zr-V coating in the range of 0.1–1 μm affects its pumping properties. In this study, the electron stimulated desorption (ESD) yields were studied for Ti-Zr-V coating deposited from a twisted target with its thickness less than 0.5 μm, while an uncoated sample was also measured as a reference. The ESD yields for H2, CH4, CO and CO2 were measured as a function of electron accumulated dose up to ∼2 × 1024 e-/m2 followed bakeout/activation by heating to 80, 120, 140, 180 and 250°C. After each ESD experiment the samples were full saturated with a mix of H2, CO and CO2. Both NEG coated samples demonstrate lower values in comparison to the uncoated one after heating/activation to temperatures up to 180°C for H2, up to 250°C for CH4, up to 140°C for CO and 120°C for CO2. The activation to 140°C is the most efficient way to reach lower pressure and avoid quick aging of the NEG coating. The thinner NEG coating provides a significantly lower ESD yield in comparison to the thicker one only after activation to 180°C, while their ESD yields are almost identical for each gas at the lower temperature.

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Section: Resultsmentioning

confidence: 98%

Section: Resultsmentioning

confidence: 99%