2018
DOI: 10.1088/1742-6596/1115/3/032012
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Effect of the mesh emission electrode shape on the distribution of the plasma density generated in the working chamber

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“…One of the most important steps in fi nite element calculations is the meshing i.e. volume separation into a number of smaller elements affecting the computational time and accuracy of the obtained results [14]. Since studied systems have axial symmetry, we have used triangular mesh an extra fi ne element size as a quick and simple way to obtain meshes of high element quality that cover almost the whole geometry.…”
Section: Methodsmentioning
confidence: 99%
“…One of the most important steps in fi nite element calculations is the meshing i.e. volume separation into a number of smaller elements affecting the computational time and accuracy of the obtained results [14]. Since studied systems have axial symmetry, we have used triangular mesh an extra fi ne element size as a quick and simple way to obtain meshes of high element quality that cover almost the whole geometry.…”
Section: Methodsmentioning
confidence: 99%