Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films

Ramos-Cano, C. J.; Miki‐Yoshida, M.; Herrera-Basurto, R.; Mercader-Trejo, F.; Fuentes-Cobas, L.; Auciello, O.; Hurtado-Macías, Abel

doi:10.1007/s00339-022-06374-3

Cited by 6 publications

(1 citation statement)

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“…Insets show the region directly affected by the SS-PFM measurement, where the reorientation of polarization with the applied electric field is observed, due to an indirect piezoelectric effect. White regions correspond to positive polarization domains (P z ), dark violet regions correspond to polarization in-plane (P x ) towards the bottom electrode, while yellow regions correspond to a remanent polarization; thus, an evident reorientation of polarization is achieved as found by many authors with this technique [ 17 , 18 , 19 , 58 , 59 ]. The hysteresis loop from switching polarization domains at a phase difference of 180° using AC voltage is presented in Figure 1 e. The amplitude (nm) versus bias voltage (V) plot in Figure 1 d exhibits a butterfly loop related to local deformation under the applied bias, which demonstrates polarization in granular domains, as described by Roelofs et al [ 60 ].…”

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confidence: 78%

The Piezoresponse in WO3 Thin Films Due to N2-Filled Nanovoids Enrichment by Atom Probe Tomography

et al. 2023

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Tungsten trioxide (WO3) is a versatile n-type semiconductor with outstanding chromogenic properties highly used to fabricate sensors and electrochromic devices. We present a comprehensive experimental study related to piezoresponse with piezoelectric coefficient d33 = 35 pmV−1 on WO3 thin films ~200 nm deposited using RF-sputtering onto alumina (Al2O3) substrate with post-deposit annealing treatment of 400 °C in a 3% H2/N2-forming gas environment. X-ray diffraction (XRD) confirms a mixture of orthorhombic and tetragonal phases of WO3 with domains with different polarization orientations and hysteresis behavior as observed by piezoresponse force microscopy (PFM). Furthermore, using atom probe tomography (APT), the microstructure reveals the formation of N2-filled nanovoids that acts as strain centers producing a local deformation of the WO3 lattice into a non-centrosymmetric structure, which is related to piezoresponse observations.

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