Effect of the oxygen content on the structure, morphology and oxidation resistance of Cr–O–N coatings

Castaldi, L.; Kurapov, D.; Reiter, Andreas; Shklover, Valery; Schwaller, P.; Patscheider, Jörg

doi:10.1016/j.surfcoat.2008.05.018

Cited by 43 publications

(28 citation statements)

References 25 publications

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“…(111), (200), and (220) lattice planes were measured in Bragg-Brentano geometry at sample tilting angles of 36 , 0 , and 45 respective to the surface normal. Under this condition, the strain e hkl can be determined by 24 e hkl ¼ 2s 12 …”

Section: Methodsmentioning

confidence: 99%

“…11 Moreover, the Young's modulus values of reactive cathodic arc-deposited cubic-structured CrO x N 1Àx with x in the range of 0 to 0.7 were measured to be 325 6 25 GPa. 12 From a crystal chemistry point of view, the substitution of nitrogen by oxygen has implications for the charge balance: according to Pauling's rules, stable ionic structures must preserve local electroneutrality. 13 It was previously shown that electroneutrality governs the incorporation of hydrogen into strontium titanate at growth temperatures of 200 C (Ref.…”

Section: Introductionmentioning

confidence: 99%

“…17,18 The following scenarios are discussed in the literature for cubic transition metal oxynitrides: the formation of excess anion interstitials 7,9 or the formation of cation vacancies. 7,9,12,19,20 However, no conclusive evidence for any of the above mentioned scenarios could be found in the published literature until Shaha et al reported, based on a comparative analysis of ab initio and XRD data, that metal vacancies form as nitrogen is substituted by oxygen in V 0.5 Al 0.5 O x N 1Àx . 10 The formation of metal vacancies enables charge neutrality of the formed oxynitride compounds.…”

Section: Introductionmentioning

confidence: 99%

“…11,12 The reasons for these inconsistencies have not been addressed in the literature. It is also evident that the calculated lattice parameters obtained from V 0.5 Al 0.5 O x N 1Àx supercells with sufficient metal vacancy concentrations to enable charge neutrality show excellent agreement with the XRD data of high power pulsed magnetron sputtered (HPPMS) thin films.…”

Section: Introductionmentioning

confidence: 99%

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Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering

Hans

Baben

Mušić

et al. 2014

Journal of Applied Physics

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Ti-Al-O-N coatings were synthesized by cathodic arc and high power pulsed magnetron sputtering. The chemical composition of the coatings was determined by means of elastic recoil detection analysis and energy dispersive X-ray spectroscopy. The effect of oxygen incorporation on the stress-free lattice parameters and Young's moduli of Ti-Al-O-N coatings was investigated by X-ray diffraction and nanoindentation, respectively. As nitrogen is substituted by oxygen, implications for the charge balance may be expected. A reduction in equilibrium volume with increasing O concentration is identified by X-ray diffraction and density functional theory calculations of Ti-Al-O-N supercells reveal the concomitant formation of metal vacancies. Hence, the oxygen incorporation-induced formation of metal vacancies enables charge balancing. Furthermore, nanoindentation experiments reveal a decrease in elastic modulus with increasing O concentration. Based on ab initio data, two causes can be identified for this: First, the metal vacancy-induced reduction in elasticity; and second, the formation of, compared to the corresponding metal nitride bonds, relatively weak Ti-O and Al-O bonds. V C 2014 AIP Publishing LLC.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering

Hans

Baben

Mušić

et al. 2014

Journal of Applied Physics

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“…α-Cr2O3 being the only crystal structure at this oxygen content for Cr makes it easier to obtain this structure with PVD-techniques. It has been deposited at temperatures of ~480 °C [42] with cathodic arc technique, and with different kind of sputtering techniques from ~60 °C [43] and ~300°C (higher crystallinity) [44,45]. This makes it suitable for stabilizing other compounds in the corundum structure.…”

Section: α-Cr2o3mentioning

confidence: 99%

Thin Film and Plasma Characterization of PVD Oxides

Landälv¹

2017

Linköping Studies in Science and Technology. Dissertations

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The state-of-the-art tools for machining metals are primarily based on a metal-ceramic composite (WC-Co) coated with different combinations of carbide, nitride and oxide coatings. Combinations of these coating materials are optimized to withstand specific wear conditions. Oxide coatings are especially desired because of their possible high hot hardness, chemical inertness with respect to the workpiece, and their low friction.This thesis deals with process and coating characterization of new oxide coatings deposited by physical vapor deposition (PVD) techniques, focusing on the Cr-Zr-O and Al-Cr-Si-O systems.The thermal stability of α-Cr0.28Zr0.10O0.61 deposited by reactive radio frequency (RF)-magnetron sputtering at 500 °C was investigated after annealing up to 870 °C. The annealed samples showed transformation of α-(Cr,Zr)2O3 and amorphous ZrOx-rich areas into tetragonal ZrO2 and bcc Cr. The instability of the α-(Cr,Zr)2O3 is surprising and possibly related to the annealing being done under vacuum, facilitating the loss of oxygen. The stabilization of the room temperature metastable tetragonal ZrO2 phase, due to surface energy effects, may prove to be useful for metal cutting applications. The observed phase segregation of α-(Cr,Zr)2O3 and formation of tetragonal ZrO2 with corresponding increase in hardness for this pseudo-binary oxide system also opens up design routes for pseudo-binary oxides with tunable microstructural and mechanical properties.The inherent difficulties of depositing insulating oxide films with PVD, demanding a closed circuit, makes the investigation of process stability an important part of this research. In this context, we investigated the influence of adding small amount of Si in Al-Cr cathode on plasma characteristics, process parameters, and coating properties. Si was chosen here due to a previous study showing improved erosion behavior of Al-Cr-Si over pure Al-Cr cathode without Si incorporation in the coating.This work shows small improvements in cathode erosion and process stability (lower pressure and cathode voltage) when introducing 5 at % Si in the Al70Cr30-cathode. This also led to fewer droplets at low cathode current and intermediate O2 flow. A larger positive effect on cathode erosion was observed with respect to cleaning the cathode from oxide contamination by increasing cathode current with 50%. However, higher cathode current also resulted in increased amount of droplets in the coating which is undesirable. Through plasma analysis the presence of volatile SiO species could be confirmed but the loss of Si through volatile SiO species was negligible, since the coating composition matched the cathode composition. The positive effect of added Si on the process stability at the cathode surface should be weighed against Si incorporation in the coating. This incorporation may or may not be beneficial for the final application since literature states that Si promotes the metastable γ-phase over the thermodynamically stable α-phase of pure Al2O3, contrary to the effect o...

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Laser structured nitride and oxynitride coatings deposited by middle frequency magnetron sputtering

Bobzin

Brögelmann

Kruppe

et al. 2019

Materialwissenschaft Werkst

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Im Rahmen dieser Untersuchungen galt es zu bestimmen, inwiefern die Variation der Laserstrahlparameter, wie z. B. Pulsenergie und Pulsanzahl, Einfluss auf die Eigenschaften von unbeschichteten Stahlsubstraten sowie von nitridischen und oxinitridischen Beschichtungen nimmt. Drei verschiedene Sauerstoff‐Gasflüsse j(O2) = 10 sccm, j(O2) = 15 sccm und j(O2) = 20 sccm im Beschichtungsprozess und entsprechend drei verschiedene resultierende Beschichtungszusammensetzungen mit xj(O2) = 10 sccm = (39,8±4,2) Atom‐%, xj(O2) = 15 sccm = (31,6±1,4) Atom‐% und xj(O2) = 20 sccm = (58,4±6,0) Atom‐% wurden untersucht. Die Analyse der Strukturtiefe mittels konfokaler Laserscanningmikroskopie zeigte, dass mit steigender Pulsenergie und Pulsanzahl die Strukturtiefe erhöht wird. Die linienartigen Interferenzstrukturen mit konstanter Periodizität wurden mittels Rasterelektronenmikroskopie erfasst. Zusätzlich sind bei allen beschichteten Oberflächen in vertikaler Richtung laserinduzierte periodische Oberflächenstrukturen mit höherer räumlicher Frequenz und kleinerer Periodizität deutlicher zu beobachten. Bei der Beschichtung mit xj(O2) = 20 sccm = (58,4±6,0) Atom‐% entstehen nach der Laserstrukturierung an den Flanken der Interferenzstruktur Mikrorisse.

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Effect of the oxygen content on the structure, morphology and oxidation resistance of Cr–O–N coatings

Cited by 43 publications

References 25 publications

Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering

Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering

Thin Film and Plasma Characterization of PVD Oxides

Laser structured nitride and oxynitride coatings deposited by middle frequency magnetron sputtering

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