2007
DOI: 10.1007/s10832-007-9336-7
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Effect of uniform and periodic doping by Ce on the properties of barium strontium titanate thin films

Abstract: A significant decrease in the dielectric loss and leakage current by introducing Ce in small amounts into BST thin films is demonstrated. The other effects of Ce doping are a lowering of the dielectric constant and a lower temperature coefficient of dielectric constant. In films containing a periodic fluctuation of Ce concentration through the thickness, prepared using a multilayer approach, the dielectric loss is further reduced. The periodicity of the composition is shown to have a significant effect on the … Show more

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Cited by 18 publications
(2 citation statements)
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“…5 Also power dissipation in memory devices is due to the leakage current through the gate dielectric material. 7 Various multilayer structures with BST as the main constituent have been studied such as BST/ SiO 2 / BST, BST/ ZrO 2 / BST, BST/ Ba 0.8 Sr 0.2 Ce x Ti 1−x O 3 ͑BSCT͒ / BST, ͑Ba, Sr͒TiO 3 / MgO/ ͑Ba, Sr͒TiO 3 ͑BST/MgO/BST͒, Ba͑Zr, Ti͒O 3 / BST/ Ba͑Zr, Ti͒O 3 ͑BZT/BST/BZT͒, etc., [8][9][10][11][12] and different properties enhancement have been also reported. Tremendous effort has been made to optimize the dielectric as well as electrical properties of BST thin films for different device applications.…”
Section: Introductionmentioning
confidence: 89%
“…5 Also power dissipation in memory devices is due to the leakage current through the gate dielectric material. 7 Various multilayer structures with BST as the main constituent have been studied such as BST/ SiO 2 / BST, BST/ ZrO 2 / BST, BST/ Ba 0.8 Sr 0.2 Ce x Ti 1−x O 3 ͑BSCT͒ / BST, ͑Ba, Sr͒TiO 3 / MgO/ ͑Ba, Sr͒TiO 3 ͑BST/MgO/BST͒, Ba͑Zr, Ti͒O 3 / BST/ Ba͑Zr, Ti͒O 3 ͑BZT/BST/BZT͒, etc., [8][9][10][11][12] and different properties enhancement have been also reported. Tremendous effort has been made to optimize the dielectric as well as electrical properties of BST thin films for different device applications.…”
Section: Introductionmentioning
confidence: 89%
“…Also, multilayer BST film of BST/Ce-BST/BST/Ce-BST/./BST [23] was an interesting structure design, and used to mitigate this difficulty. As dopants can reduce crystal grain size, and often reduce permittivity and lower dielectric loss, thus it can be reasonable and feasible to design and synthesize alternately doped multilayer BST film of A1-BST/A2-BST/A1-BST/A2-BST/./A2-BST (where A1 and A2 show two different dopants) to conquer the difficulty, but there has been no such report yet.…”
Section: Introductionmentioning
confidence: 99%