The properties of amorphous carbon ͑a-C͒ deposited using a filtered cathodic vacuum arc as a function of the ion energy and substrate temperature are reported. The sp 3 fraction was found to strongly depend on the ion energy, giving a highly sp 3 bonded a-C denoted as tetrahedral amorphous carbon ͑ta-C͒ at ion energies around 100 eV. The optical band gap was found to follow similar trends to other diamondlike carbon films, varying almost linearly with sp 2 fraction. The dependence of the electronic properties are discussed in terms of models of the electronic structure of a-C. The structure of ta-C was also strongly dependent on the deposition temperature, changing sharply to sp 2 above a transition temperature, T 1 , of Ϸ200°C. Furthermore, T 1 was found to decrease with increasing ion energy. Most film properties, such as compressive stress and plasmon energy, were correlated to the sp 3 fraction. However, the optical and electrical properties were found to undergo a more gradual transition with the deposition temperature which we attribute to the medium range order of sp 2 sites. We attribute the variation in film properties with the deposition temperature to diffusion of interstitials to the surface above T 1 due to thermal activation, leading to the relaxation of density in context of a growth model.