2022 International Semiconductor Conference (CAS) 2022
DOI: 10.1109/cas56377.2022.9934537
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Effect of VN buffer layer on the magnetic anisotropy of epitaxial Ni80Fe20thin films deposited on MgO (001) substrates

Abstract: This study incorporates the structural and magnetic characterization of epitaxial Ni80Fe20 films grown by direct current magnetron sputtering on MgO(001) and MgO(001)||VN(001) substrates. A series of samples grown with different N2 flow settings for the deposition of VN and similar permalloy deposition parameters was utilized to investigate the effect of morphological evolution and buffer layer induced strain on the magnetic properties of Ni80Fe20. X-ray diffraction analysis reveals an epitaxial nature of the … Show more

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