Effect of working fluid, acceleration and heater power on temperature profile inside a thermal convective accelerometer

Ishak, Mohammad Zulfikar; Sidek, Othman; Aziz, Jalal Abdullah; Mohd, Shukri Korakkottil Kunhi; Miskam, Muhamad Azman

doi:10.1109/rsm.2011.6088355

Cited by 4 publications

(4 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Therefore, manufacturing using a large cavity size will increase the sensitivity of the accelerometer. These results are consistent with those of previously reported papers [ 15 , 16 , 17 , 18 ]. Figure 7 b shows the frequency response of the proposed convective sensor with different cavity volumes.…”

Section: Resultssupporting

confidence: 94%

“…However, it can be transformed from one form to another. In other words, powered heaters with high temperature can transfer a large amount of thermal energy to the working gas medium, which leads to high sensitivity of the thermal convection–based accelerometer [ 18 ]. In practical applications, however, we need to consider the power consumption and sensitivity of the accelerometer.…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

Han

Kim

Park

et al. 2017

Sensors

View full text Add to dashboard Cite

This paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is the thermal convection of a gas medium, a simple model is proposed and developed in which the performance of the thermal convection–based accelerometer is closely associated with the Grashof number, Gr and the Prandtl number, Pr. This paper discusses the experiments that were performed by varying several parameters such as the heating power, cavity size, gas media, and air pressure. The experimental results demonstrate that an increase in the heating power, pressure, and cavity size leads to an increase in the accelerometer sensitivity. However, an increase in the pressure and/or cavity size results in a decrease in the frequency bandwidth. This paper also discusses the fact that a working-gas medium with a large thermal diffusivity and small kinematic viscosity can widen the frequency bandwidth and increase the sensitivity, respectively.

show abstract

Section: Resultssupporting

confidence: 94%

Section: Resultsmentioning

confidence: 99%

Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

Han

Kim

Park

et al. 2017

Sensors

View full text Add to dashboard Cite

show abstract

“…It was also shown that the sensitivity decreased almost linearly with increase of the external ambient Review of Micromachined Thermal Accelerometers 14 temperature. The effect of different working fluids like air, CO 2 , N 2 , water, Ar, He, and ethylene glycol in static and dynamic conditions were studied numerically in [41]. Different fluids yield different Gr and Pr, hence, producing different heat convection behavior and temperature distribution within the accelerometer.…”

Section: 1: Thermal Accelerometer In Mems Processmentioning

confidence: 99%

A review of micromachined thermal accelerometers

Mukherjee¹,

Basu²,

Mandal³

et al. 2017

J. Micromech. Microeng.

View full text Add to dashboard Cite

Thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and integrability with CMOS integrated circuit technology. This article provides a comprehensive survey of the research, development, and current trends in the field of thermal acceleration sensors, with detailed enumeration on the theory, operation, modeling, and numerical simulation of such devices. Different reported varieties and structures of thermal accelerometers have been reviewed highlighting key design, implementation, and performance aspects. Materials and technologies used for fabrication of such sensors have also been discussed. Further, the advantages and challenges for thermal accelerometers vis-à-vis other prominent accelerometer types have been presented, followed by an overview of associated signal conditioning circuitry and potential applications.

show abstract

“…According to the mechanism of the micro-machined airflow inclinometer, any change of the environmental temperature will generate a drift current in the detection bridge circuit and a temperature drift affecting the sensor’s sensitivity. So far most studies have focused on the effect of types of working fluid media, sensor position, acceleration, shape and structure of the package and heater power on the sensitivity of gas-flowing sensors [11,12,13,14], but there are few reports in the past studies referring to the effects of ambient temperature on the gas-flowing sensor sensitivity. Different distributions of components will result in different thermal distributions on the PCB for an airflow inclinometer, which could change the surrounding temperature of the sensing element accordingly.…”

Section: Introductionmentioning

confidence: 99%

Genetic Algorithm (GA)-Based Inclinometer Layout Optimization

Liang

Zhang

Chen

et al. 2015

Sensors

View full text Add to dashboard Cite

This paper presents numerical simulation results of an airflow inclinometer with sensitivity studies and thermal optimization of the printed circuit board (PCB) layout for an airflow inclinometer based on a genetic algorithm (GA). Due to the working principle of the gas sensor, the changes of the ambient temperature may cause dramatic voltage drifts of sensors. Therefore, eliminating the influence of the external environment for the airflow is essential for the performance and reliability of an airflow inclinometer. In this paper, the mechanism of an airflow inclinometer and the influence of different ambient temperatures on the sensitivity of the inclinometer will be examined by the ANSYS-FLOTRAN CFD program. The results show that with changes of the ambient temperature on the sensing element, the sensitivity of the airflow inclinometer is inversely proportional to the ambient temperature and decreases when the ambient temperature increases. GA is used to optimize the PCB thermal layout of the inclinometer. The finite-element simulation method (ANSYS) is introduced to simulate and verify the results of our optimal thermal layout, and the results indicate that the optimal PCB layout greatly improves (by more than 50%) the sensitivity of the inclinometer. The study may be useful in the design of PCB layouts that are related to sensitivity improvement of gas sensors.

show abstract

Effect of working fluid, acceleration and heater power on temperature profile inside a thermal convective accelerometer

Cited by 4 publications

References 8 publications

Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

A review of micromachined thermal accelerometers

Genetic Algorithm (GA)-Based Inclinometer Layout Optimization

Contact Info

Product

Resources

About