Ultrathin films and multilayers, with controlled thickness down to single atomic layers, are critical for advanced technologies ranging from nanoelectronics to spintronics to quantum devices. However, for thicknesses less than 10 nm, surfaces and dopants contribute significantly to the film properties, which can differ dramatically from that of bulk materials. For amorphous films being developed as low dielectric constant interfaces for nanoelectronics, the presence of surfaces or dopants can soften films and degrade their mechanical performance. Here we use coherent short-wavelength light to fully and nondestructively characterize the mechanical properties of individual films as thin as 5 nm within a bilayer. In general, we find that the mechanical properties depend both on the amount of doping and the presence of surfaces. In very thin (5-nm) silicon carbide bilayers with low hydrogen doping, surface effects induce a substantial softening-by almost an order of magnitude-compared with the same doping in thicker (46-nm) bilayers. These findings are important for informed design of ultrathin films for a host of nano-and quantum technologies, and for improving the switching speed and efficiency of next-generation electronics.can characterize films with thicknesses on the order of a 80 fraction of a micron, when combined with advanced modeling 81 [23,24]. Surface Brillouin light scattering, which uses the 82 interaction of light and acoustic phonons, has extracted the 83 full elastic tensor of films of thicknesses down to 25 nm [25]. 84 However, it has difficulty characterizing thinner films without 85 assuming one of the elastic constants. In past work, we used 86 coherent extreme ultraviolet (EUV) beams to characterize the 87 full elastic tensor of isotropic ultrathin films down to 11 nm 88 in thickness [21]. This allowed us to simultaneously extract 89 the Young modulus and Poisson's ratio of low-k amorphous 90 SiC:H films with varying degrees of stiffness and hydrogena-91 tion, in a single measurement. 92 In this work, we show how dopants and surfaces inter-93 play to determine the elastic properties of low-k (k < 4.2) 94 dielectric films that are being developed for next-generation 95 nanoelectronics. We use coherent short-wavelength light to 96 fully and nondestructively characterize the mechanical prop-97 erties of SiOC:H films and SiC:H bilayers with individual 98 layers as thin as 5 nm. This allows us to distinguish between 99 dopant-induced and surface-induced softening. For example, 100 in very thin (5-nm) silicon carbide films with low hydrogen 101 doping, surface effects induce a substantial softening-by al-102 most an order of magnitude-compared with the same doping 103 in thicker (46-nm) films. These findings are important for 104 informed design of ultrathin films for a host of nano-and 105 quantum technologies, and for improving the switching speed 106 and efficiency of next-generation electronics. 107 II. METHODS 108 To distinguish between surface-induced softening and 109 dopant-induced softening,...