Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency

Abstract

Ti/Au multi-layered micro-cantilevers with complex three-dimensional structures used as micro-components in micro-electromechanical systems (MEMS) sensors were prepared by lithography and electrodeposition, and the effective Young’s modulus was evaluated by the resonance frequency method and finite element method simulation. Effects of the constraint condition at the fixed-end of the micro-cantilever and the temperature dependency of the effective Young’s modulus were studied. Three types of the constraint at the fixed-end were prepared, which were normal type (constraining only bottom surface of the fixed-end), block type (constraining both top and bottom surfaces), and bridge type (top surfaces covering with a bridge-like structure). The temperature dependency test was conducted in a temperature range from 150 to 300 °C in a vacuum chamber. An increase in the effective Young’s modulus was observed as the constraint condition became more rigid, and the effective Young’s modulus merely changed as the temperature varied from room temperature to 300 °C.

Recent Advances in Electrophysiological Recording Platforms for Brain and Heart Organoids

“…[115][116][117] The Young's modulus (YM) of PEDOT:PSS is about 2.6 GPa, which is a significantly low value compared with other materials (e.g., gold: 78.5 GPa, platinum: 155 GPa, and silicon: 165 GPa). [118][119][120][121][122] Although the YM of PEDOT:PSS is around 50-fold lower than other conventional materials, it is still much higher than the organoids' YM (<3 kPa). [123,124] In addition, pristine PEDOT:PSS possesses low electrical conductivity (<1 S cm À1 ).…”

Electrodeposition of Ni–B Alloy Film: Effect of Current Density and Heat Treatment on Micro-Mechanical Property

“…12 Furthermore, heat treatment or thermal annealing is a common process applied in fabrication of electronic components, such as the fabrication of MEMS accelerometer. 13 Mechanical properties of electrodeposits are expected to be affected by the heat treatment process. For electrodeposited Ni-B alloys, after the heat treatment, Ni 3 B intermetallic phase is formed in the heat treated Ni-B alloys as reported in several works, 8,9,[14][15][16] and the Ni 3 B phase leads to an increase in the hardness due to the precipitation strengthening mechanism.…”