2022
DOI: 10.1364/oe.445600
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Effects and mechanisms of In surfactant on high Al-content AlGaN grown by plasma-assisted molecular beam epitaxy

Abstract: High Al-content AlGaN epilayers were grown on AlN template by using indium (In) surfactant with plasma-assisted molecular beam epitaxy (PA-MBE), and deep ultraviolet emission at 235 nm was obtained at room temperature. The effects and mechanisms of In-surfactant on the crystalline quality and optical properties of AlGaN were investigated. It was found that In-surfactant could facilitate two-dimensional AlGaN growth by reducing activation barrier for Al/Ga atoms to cross steps and effectively increasing the mig… Show more

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Cited by 8 publications
(2 citation statements)
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“…For an example, by introducing In-surfactant in InGaN/GaN multi-quantum well (MQW) growth of green LEDs, particularly in QBs [10][11][12]. Such technique promoted sharp and smooth interfaces [13,14], while controlling threading dislocations (TDs) and indium out-diffusion [15][16][17]. Besides, photoluminescence intensity of the LEDs can be increased, as reported in [18,19].…”
Section: Introductionmentioning
confidence: 96%
“…For an example, by introducing In-surfactant in InGaN/GaN multi-quantum well (MQW) growth of green LEDs, particularly in QBs [10][11][12]. Such technique promoted sharp and smooth interfaces [13,14], while controlling threading dislocations (TDs) and indium out-diffusion [15][16][17]. Besides, photoluminescence intensity of the LEDs can be increased, as reported in [18,19].…”
Section: Introductionmentioning
confidence: 96%
“…Numerous research groups have investigated PL spectroscopy of AlGaN alloys grown via metalorganic vapor phase epitaxy (MOVPE) [21][22][23]. Molecular beam epitaxy (MBE), being a crucial epitaxial technique, offers unique advantages in fundamental research owing to its ultra-high vacuum conditions and employment of ultra-high purity metal sources [24][25][26]. Epitaxial growth conditions, including growth temperature, growth mode, and V/III ratio, significantly impact material quality [27].…”
Section: Introductionmentioning
confidence: 99%