Effects of assisting ion energy and current on MgO films fabricated by ion-beam-assisted sputtering deposition

Tong, Shuo; Liu, H. N.; Li, X.; Wang, Zhi

doi:10.1179/1432891715z.0000000001781

Materials Research Innovations

2015

DOI: 10.1179/1432891715z.0000000001781

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Effects of assisting ion energy and current on MgO films fabricated by ion-beam-assisted sputtering deposition

Shuo Tong

H. N. Liu

X. Li³

et al.

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Effects of assisting ion energy and current on MgO films fabricated by ion-beam-assisted sputtering deposition

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References 9 publications

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