Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators

Vahdat, Armin Saeedi; Rezazadeh, Ghader

doi:10.1016/j.jfranklin.2011.01.007

Cited by 59 publications

(12 citation statements)

References 27 publications

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“…On the other hand, Lachut and Sader [ 221 ] found that the effect of the strain-independent part of the surface stress on the resonant frequency can be obtained using fully three-dimensional models. Effects of residual and axial stresses on the micro-beam resonators were reported in [ 222 ]. Park and Klein [ 188 , 223 ] quantified, for the first time, how both the residual (strain-independent) and surface elastic (strain-dependent) parts of the surface stress impact the resonant frequencies of metal nanowires.…”

Section: Major Influencing Factorsmentioning

confidence: 99%

Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

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Section: Major Influencing Factorsmentioning

confidence: 99%

Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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“…0 P P is the portion of piezoelectric material in the mid plane of the micro beam with respect to the silicon satisfying 0 0 1 P Si P P + = . The strain energy due to the bending, axial piezoelectric force and mid-plane stretching, are denoted by b U , P U , a U respectively [45]. b U is expressed as:…”

Section: Modelingmentioning

confidence: 99%

On the dynamics of a micro-gripper subjected to electrostatic and piezoelectric excitations

Kivi

Azizi

2015

International Journal of Non-Linear Mechanics

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“…From a technical point of view, the evaluation of thermoelastic damping (TED) of those structural elements at the design stage plays an important role in maintaining the required engineering characteristics. TED belongs to fundamental sources of eigen damping in the microelectromechanical systems (MEMS) [25] and nanoelectromechanical systems (NEMS) [3,26] working in the vacuum regime. Evoy et al [27] and Duwel et al [7] have shown experimentally that TED is the dominant source of damping in MEMS and NEMS devices.…”

Section: Introductionmentioning

confidence: 99%

“…Sun et al [32][33][34], Sharma et al [35] and Rezazadeh et al [36] investigated thermoelastic damping in capacity microbeam resonators using the hyperbolic heat trans-fer model. Besides, Vahdat and Rezazadeh [25] investigated the effect of axial and residual stresses on thermoelastic damping in a capacity microbeam resonator.…”

Section: Introductionmentioning

confidence: 99%

Thermoelastic vibrations of a Timoshenko microbeam based on the modified couple stress theory

et al. 2019

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The dependence of the quality factor of nonlinear microbeam resonators under thermoelastic damping for Timoshenko beams with regard to geometric nonlinearity has been studied. The constructed mathematical model is based on the modified cou-Russian Federation 634050 ple stress theory which implies prediction of sizedependent effects in microbeam resonators. The Hamilton principle has yielded coupled nonlinear thermoelastic PDEs governing dynamics of the Timoshenko microbeams for both plane stresses and plane deformations. Nonlinear thermoelastic vibrations are studied analytically and numerically and quality factors of the resonators versus geometric and material microbeam properties are estimated. Results are presented for gold microbeams for different ambient temperatures and different beam thicknesses, and they are compared with results yielded by the classical theory of elasticity in linear/nonlinear cases.

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Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators

Cited by 59 publications

References 27 publications

Tunable Micro- and Nanomechanical Resonators

Tunable Micro- and Nanomechanical Resonators

On the dynamics of a micro-gripper subjected to electrostatic and piezoelectric excitations

Thermoelastic vibrations of a Timoshenko microbeam based on the modified couple stress theory

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