“…The replicated pattern quality of the hot embossed part is significantly influenced by the process parameters, such as embossing pressure, embossing temperature, and holding time [ 27 , 28 , 29 , 30 , 31 ]. Furthermore, the effects of the geometric structures and size of the mold cavity on the hot embossing process are critical issues that need to be addressed, because the polymer replication ratio and filling height of the hot embossed product share a complicated nonlinear relationship with cavity size and density [ 32 , 33 , 34 , 35 ]. A nonuniform filling phenomenon is observed when a single embossing master mold contains multiple, nonuniform feature geometries.…”