Effects of composition and substrate temperature on the magnetic properties and perpendicular anisotropy of NdFeB thin films

Yang, Joon-Eon; Kim, M.J; Cho, S.H; Kim, H.T; Kim, Y.B; Kim, D.H; Kapustin, G.A.; Lee, Kee Hag

doi:10.1016/s0304-8853(02)00152-x

Cited by 13 publications

(2 citation statements)

References 8 publications

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“…It is of great significance to investigate how to prepare thick NdFeB films with high perpendicular magnetic anisotropy. The formation of textured NdFeB film is affected by the deposition process (deposition temperature, sputtering pressure, and power) [18,19] and film composition. The one-step crystallization by thermal deposition or annealing after thermal deposition is conducive to the formation of perpendicular magnetic anisotropy [20][21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

Achievement of High Perpendicular Anisotropy and Modification of Heat Treatment Peeling in Micron-Thickness Nd-Fe-B Films Used for Magnetic MEMS

et al. 2023

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Thick Nd-Fe-B permanent magnetic films with good perpendicular anisotropy have important applications in magnetic microelectromechanical systems (MEMSs). However, when the thickness of the Nd-Fe-B film reaches the micron level, the magnetic anisotropy and texture of NdFeB film will become worse, and it is also prone to peeling during heat treatment, which seriously limits their applications. In this paper, Si(100)/Ta(100 nm)/NdxFe91−xB9(x = 14.5, 16.4, 18.2)/Ta (100 nm) films with thicknesses of 2–10 μm are prepared by magnetron sputtering. It is found that gradient annealing (GN) could help improve the magnetic anisotropy and texture of the micron-thickness film. When the Nd-Fe-B film thickness increases from 2 μm to 9 μm, its magnetic anisotropy and texture do not deteriorate. For the 9 μm Nd-Fe-B film, a high coercivity of 20.26 kOe and high magnetic anisotropy (remanence ratio Mr/Ms = 0.91) are achieved. An in-depth analysis of the elemental composition of the film along the thickness direction is conducted, and the presence of Nd aggregation layers at the interface between the Nd-Fe-B and the Ta layers is confirmed. The influence of thicknesses of the Ta buffer layer on the peeling of Nd-Fe-B micron-thickness films after high-temperature annealing is investigated, and it is found that increasing the thickness of the Ta buffer layer could effectively inhibit the peeling of Nd-Fe-B films. Our finding provides an effective way to modify the heat treatment peeling of Nd-Fe-B films. Our results are important for the development of Nd-Fe-B micron-scale films with high perpendicular anisotropy for applications in magnetic MEMS.

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Section: Introductionmentioning

confidence: 99%

Achievement of High Perpendicular Anisotropy and Modification of Heat Treatment Peeling in Micron-Thickness Nd-Fe-B Films Used for Magnetic MEMS

et al. 2023

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“…A number of technological parameters, i.e. target composition, annealing temperature or deposition temperature, buffer layer material and sputter gas pressure, affect the microstructure of NdFeB film and the hard magnetic properties [8][9][10][11]. In particular, the composition is a crucial issue for NdFeB ternary alloy film.…”

Section: Introductionmentioning

confidence: 99%

Nd composition dependence of microstructure and magnetic properties for gradient sputtered NdFeB films

Wang

Fang

et al. 2008

Journal of Magnetism and Magnetic Materials

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1.2.1.2 (R,R’)2(Fe,M)14B-based nanocomposites

Djéga‐Mariadassou

2013

Nanocrystalline Materials, Part A

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Effects of composition and substrate temperature on the magnetic properties and perpendicular anisotropy of NdFeB thin films

Cited by 13 publications

References 8 publications

Achievement of High Perpendicular Anisotropy and Modification of Heat Treatment Peeling in Micron-Thickness Nd-Fe-B Films Used for Magnetic MEMS

Achievement of High Perpendicular Anisotropy and Modification of Heat Treatment Peeling in Micron-Thickness Nd-Fe-B Films Used for Magnetic MEMS

Nd composition dependence of microstructure and magnetic properties for gradient sputtered NdFeB films

1.2.1.2 (R,R’)2(Fe,M)14B-based nanocomposites

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