2024
DOI: 10.35848/1347-4065/ad27bf
|View full text |Cite
|
Sign up to set email alerts
|

Effects of crystallinity of silicon channels formed by two metal-induced lateral crystallization methods on the cell current distribution in NAND-type 3D flash memory

Haruki Matsuo,
Hiroki Yamashita,
Yusuke Shimada
et al.

Abstract: Two metal-induced lateral crystallization (MILC) methods are proposed as candidate techniques to enhance cell current in future ultra-high-density NAND-type 3D flash memory devices. The channel crystallinity differs depending on the MILC method. In a single MILC, the channel is composed of single-crystal Si, whereas in a regional MILC, the channel comprises multiple crystal grains that are larger than those of the conventional polycrystalline Si. Using transmission electron microscopy, the inhibiting factor of… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 32 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?