Effects of deposition and post-annealing conditions on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition

Nanostructured TiAlCuN and TiAlCuCN coatings for spacecraft: effects of reactive magnetron deposition regimes and compositions

“…An important problem in the formation of coatings by ion-plasma methods is the prediction of their composition, structure, and, consequently, their physical and mechanical properties. 12 In a number of published studies 12–15 it has been shown that all the deposition parameters seriously influence the coating structure and mechanical characteristics.…”