Effects of electrostatic nonlinearity on the rate measuring performance of ring based Coriolis Vibrating Gyroscopes (CVGs)

Arifin, Davin; McWilliam, Stewart

doi:10.1016/j.sna.2022.113539

Cited by 5 publications

(2 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For example, a frequency split of Δf = 1 Hz results in a bias error of 360°/s [ 57 ]. The deviation of the sensor from its mean value of the output rate is called the bias stability (or bias instability), the zero-bias error [ 59 ], or the signal-to-noise ratio, which is a measure of the gyroscope stability over a specified period of time or quality of measurement [ 62 ]. Bias instability, which is a performance quality measurement of gyroscopes, is a drift of the measurement from the average value, also called the drift angle or bias drift, and has a unit of degree/h.…”

Section: Theory and Performance Of Hrgmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

View full text Add to dashboard Cite

Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

show abstract

Section: Theory and Performance Of Hrgmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

View full text Add to dashboard Cite

show abstract

“…However, for Type I gyroscopes with identical drive and sense modes, it is essential that their resonant structures possess impeccable symmetry 7 . Unfortunately, due to manufacturing imperfections, the fabricated gyroscope's resonant structure is not perfectly symmetrical due to the non-uniform distribution of crucial structural parameters such as stiffness and damping 8 . Consequently, the primary sources of errors that impact gyroscope performance stem from the asymmetry in stiffness and damping.…”

Section: Introductionmentioning

confidence: 99%

An automatic damping-matching method for eliminating 87.64% damping asymmetry of MEMS vibratory gyroscope in rate mode

Zhou,

Ren,

Zhou

et al. 2023

Preprint

View full text Add to dashboard Cite

The damping asymmetry error is a prominent factor influencing the static performance of fully symmetrical Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes. To eliminate this error and enhance the gyroscope's static performance, this paper introduces a method for real-time identification and automatic matching of the damping asymmetry error in rate mode. By leveraging the vibration characteristics of the fully symmetrical MEMS vibratory gyroscope in rate mode, dedicated online test methods are devised to determine the quality factors for both the drive and sense modes, enabling online identification of the damping asymmetry error. Furthermore, an automatic damping-matching system is devised utilizing the mechanical-thermal dissipation mechanism of a resistive damper. The effectiveness of this proposed method is validated through simulations and experiments conducted on a MEMS disk resonator gyroscope (DRG). The experimental results show an accuracy within 4% for quality factor identification, while automatic damping matching effectively reduces the damping asymmetry error by 87.64%. Employing this automatic damping-matching method successfully diminishes the zero-input bias caused by damping asymmetry error in the MEMS DRG from 0.1067°/s to 0.0249°/s and improves bias instability from 0.3985°/s to 0.1878°/s.

show abstract

High-precision identification and compensation of nonlinear error in hemispherical resonator gyro

Wang,

Yi,

Xie

et al. 2024

Measurement

View full text Add to dashboard Cite

Effects of electrostatic nonlinearity on the rate measuring performance of ring based Coriolis Vibrating Gyroscopes (CVGs)

Cited by 5 publications

References 19 publications

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

An automatic damping-matching method for eliminating 87.64% damping asymmetry of MEMS vibratory gyroscope in rate mode

High-precision identification and compensation of nonlinear error in hemispherical resonator gyro

Contact Info

Product

Resources

About