2021
DOI: 10.1088/1361-6595/ac352d
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Effects of gas adsorbed on solid surface during gas breakdown in electron cyclotron resonance discharges

Abstract: The microwave breakdown power (Pwb) in an ECR plasma source was not merely determined by pressure (gas flow rate), but found to vary with the time interval between two successive breakdowns. The measured Pwb dropped rapidly from a high value at a short time interval to a low level at a long time interval. The obtained dependence of Pwb on pressure (gas flow rate) exhibited distinct features: the normal monotonicity and abnormal non-monotonicity at the short and long time intervals, respectively. The effective … Show more

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