1994
DOI: 10.1007/bf00560113
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Effects of high-energy ion implantation into metals

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Cited by 8 publications
(21 citation statements)
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“…Therefore, most of the interstitial atoms will migrate to the sinks [ 141 and recombine there. As a result, the concentration of vacancies will be higher than the interstitial atoms, so the vacancies and gas atoms will nucleate in many ways to form gas bubbles (or voids) [15].…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, most of the interstitial atoms will migrate to the sinks [ 141 and recombine there. As a result, the concentration of vacancies will be higher than the interstitial atoms, so the vacancies and gas atoms will nucleate in many ways to form gas bubbles (or voids) [15].…”
Section: Resultsmentioning
confidence: 99%
“…For calculating the ion profiles implanted into tar gets, the known formula (see [10]) was used: (1) here N 0 is atomic target density; Φ is ion fluence; S is sputtering coefficient for target atoms; and are projected range and straggling of ions in the target. The maximum ion depth concentration should be (2) at the respective depth Z max = R p -…”
Section: Physics Of Solid State and Condensed Mattermentioning
confidence: 99%
“…And also low-cost compact equipment can be used [8]. Moreover, high heating rates enable to combine both the advantages of ion-beam and highfrequency processing [9][10][11][12][13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%