By means of atomic force microscopy (AFM) measurements, the evolution of surface relief characteristics of stress induced martensite plates was investigated on the surface of polished Fe-14Mn-6Si-9Cr-5Ni and Fe–28Mn–6Si–5Cr (mass. %) shape memory alloys (SMAs), subjected to various pre-straining degrees. Pre-straining degree was chosen as an independent variable, considering its influence on the reverse transformation of martensite. The specimens were cast by means of a levitation induction furnace and hot rolled to 1 mm-thickness in order to better reveal the shape memory phenomena. The specimens, cut by spark erosion to “dog-bone” shapes, were pre-strained by means of a tensile testing machine at room temperature (RT). The gauges of elongated specimens were analyzed by AFM. Qualitative 2D analyses were performed on AFM micrographs. Quantitative evaluations were based on systematic dimensional measurements of martensite profiles, allowing the determination of the average values of plate widths and heights for four pre-straining degrees of the two SMA systems under study. The variation tendencies of average values of martensite plate widths and heights with increasing the pre-straining were examined under the form of increasing rates of the plate widths and heights. The results show that, for the two SMA systems studied, the average widths and heights of stress-induced martensite plates varied between 80 and 188 nm for Fe-14Mn-6Si-9Cr-5Ni and between 101 and 192 nm for Fe-28Mn-6Si-5Cr. These dimensions experienced an increasing tendency with pre-straining degree, with a rate of about 30 nm/ % pre-strain.