Effects of hydrogen dilution on CN  film properties deposited using rf PECVD from a mixture of ethane, nitrogen and hydrogen

Othman, Maisara; Ritikos, Richard; Khanis, Noor Hamizah; Rashid, Nur Maisarah Abdul; Gani, Siti Meriam Ab.; Rahman, Saadah Abdul

doi:10.1016/j.matchemphys.2014.01.005

Cited by 6 publications

(6 citation statements)

References 39 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Nevertheless, it is interesting to note that when Ar:N 2 :CH 4 mixture was used, the C = N bonding seemed to predominate over the C≡N, which was in accordance with the XPS results, as well as an increase of sp 3 carbon when CH 4 was used, presumably by the saturation of carbon chains as proposed from EELS and Raman results. Comparing these results with related previous works, 27,28 it seems that the effect of introducing CH 4 to the Ar:N 2 mixture had a substantially different effect contrasted with only H 2 , for instance. The decrease in C≡N groups when including CH 4 in the NC-based membranes could be explained by the fact that dissociated CH 4 molecules took a bigger share of the plasma kinetic energy from N 2 ions, reducing the formation of energy demanding groups like C≡N.…”

Section: N-doped Nanostructured Carbon Ro Membranes J Ortiz-medina Et Alsupporting

confidence: 81%

Nanostructured carbon-based membranes: nitrogen doping effects on reverse osmosis performance

et al. 2016

View full text Add to dashboard Cite

Ultrathin, flexible and highly water-permeable nanostructured carbon (NC)-based membranes are formed on porous polymer supports by plasma high-power impulse magnetron sputtering in order to fabricate carbon-based membranes for water desalination. The carbon membranes are produced at room temperature using mixtures of argon (Ar), nitrogen (N 2 ) and methane (CH 4 ) as precursors, and this procedure constitutes a simple solvent-free, waste-free scalable process. Structural characterization, molecular simulation, water permeation and salt rejection assessments are used to correlate the performance and membrane structure. Molecular simulations indicate that nitrogen doping on the carbon-based membranes drastically modifies the pore distribution and avoids the formation of clustered regions of high-density carbons. The optimum NC-based membrane has up to 96% salt rejection rate for 0.2 wt% NaCl saline water, with high water permeability ca. 25 l m − 2 h − 1 MPa − 1 . The NC-based membranes as active layers for desalination membranes exhibit attractive characteristics which render them a potential alternative to current polymeric technology used in reverse osmosis processes.

show abstract

Section: N-doped Nanostructured Carbon Ro Membranes J Ortiz-medina Et Alsupporting

confidence: 81%

Nanostructured carbon-based membranes: nitrogen doping effects on reverse osmosis performance

et al. 2016

View full text Add to dashboard Cite

show abstract

“…The FTIR spectra in Figure 3(a) showed the existence of C-N (sp 3 ), C=N (sp 2 ), C≡N (sp 1 ), C-H and N-H/O-H bonds within a scanning range from 1000 to 4000 cm -1 as expected in a-CN x thin films. In accordance with previous studies, the peaks correspond to the formation of single, double and triple CN bonds at wavenumbers of 1100, 1642 and 2333 cm -1 , respectively (Legrand et al 1999;Othman et al 2014;Tien et al 2015), together with the C-H and OH bonds within the region of 2800-3000 and 3200-3500 cm -1 , respectively. As the presence of the C=N and C≡N bonds in a-CN x thin films are preferential in detecting moisture for humidity sensor, the discussion of the infrared transmission spectra focuses on C=N and C≡N peaks.…”

Section: )supporting

confidence: 92%

“…Continuation of the work, the sensitivity a-CN x thin films as a humidity sensor, produced from ethane (C 2 H 6 ) gas is studied. Higher C to H ratio in C 2 H 6 gas is expected to induce the nitrogen incorporations in the films (Othman et al 2014) and promote the formation of paracyanogen (C=N) and nitrile (C≡N) bands (Othman et al 2013). Higher content of these bands can enhance the humidity sensing property of a-CN x thin films (Lee & Lee 2015).…”

Section: Introductionmentioning

confidence: 99%

Effect of Radio Frequency Power on a-CNx Film Properties and Its Performance as Humidity Sensors

Awang¹,

Purhanudin

Salman

2018

JSM

View full text Add to dashboard Cite

A series of amorphous carbon nitride (a-CN x) thin films were deposited on silicon (111) substrates using a home-built radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) system. The a-CN x thin films were deposited from a mixture of a fixed flow-rate of ethane (C 2 H 6 , 20 sccm) and nitrogen (N 2 , 47 sccm) gases with varying RF power. A higher ratio of C to H (C to H ratio is 1:3) atoms in C 2 H 6 as compared to the ratio in methane (CH 4) gas (C to H ratio is 1:4) is expected to produce an interesting effect to the film properties as humidity sensor. The characterization techniques used to determine the morphology and chemical bonding of the thin films are field emission scanning electron microscopy (FESEM) and Fourier transform infrared spectroscopy (FTIR), respectively. The variation of morphology and the existence of nitrile band in these samples are correlated with the electrical properties of a-CN x thin films. Using humidity sensing system, the sensing performance of the samples was examined. It was found that the response of sensors towards the percentage of relative humidity (% RH) change is good resistive responses and good repeatability. The sensitivity of the prepared a-CN x thin films is significantly higher (up to 79%) as compared to previous studies using CH 4 or acetylene as precursor gas. Based on these results, the properties and the sensitivity of the a-CN x thin films towards humidity can be tailored by using an appropriate precursor gases and deposition parameters.

show abstract

“…The spectra show the presence of the C=C and/or C=N and/or C=O bonding (1500-1750cm -1 ) [24], C≡N (~2200cm -1 ), C-H group (2800-3000cm -1 ) and N-H and/or O-H bonds (3200-3700cm -1 ) [25]. It could be seen that the C-H peaks decreases significantly when D E is decreased particularly at D E of 1cm.…”

Section: Page 8 Of 26mentioning

confidence: 94%

Wetting behaviour of carbon nitride nanostructures grown by plasma enhanced chemical vapour deposition technique

Kamal

Ritikos

Rahman

2015

Applied Surface Science

Self Cite

View full text Add to dashboard Cite

Effects of hydrogen dilution on CN film properties deposited using rf PECVD from a mixture of ethane, nitrogen and hydrogen

Cited by 6 publications

References 39 publications

Nanostructured carbon-based membranes: nitrogen doping effects on reverse osmosis performance

Nanostructured carbon-based membranes: nitrogen doping effects on reverse osmosis performance

Effect of Radio Frequency Power on a-CNx Film Properties and Its Performance as Humidity Sensors

Wetting behaviour of carbon nitride nanostructures grown by plasma enhanced chemical vapour deposition technique

Contact Info

Product

Resources

About