1981
DOI: 10.1016/0378-5963(81)90021-0
|View full text |Cite
|
Sign up to set email alerts
|

Effects of implantation and annealing on the Raman spectrum of InP and GaAs

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
4
0

Year Published

1984
1984
2018
2018

Publication Types

Select...
6
1
1

Relationship

0
8

Authors

Journals

citations
Cited by 31 publications
(4 citation statements)
references
References 20 publications
0
4
0
Order By: Relevance
“…A HIM image showing the surface roughness of the Au film is shown inset in Fig 4(c). In each of the spectra we observe both the longitudinal optical (LO) phonon and forbidden transverse optical (TO) phonons for InP due to the breaking of crystal symmetry after sputtering 28 .…”
Section: +mentioning
confidence: 99%
“…A HIM image showing the surface roughness of the Au film is shown inset in Fig 4(c). In each of the spectra we observe both the longitudinal optical (LO) phonon and forbidden transverse optical (TO) phonons for InP due to the breaking of crystal symmetry after sputtering 28 .…”
Section: +mentioning
confidence: 99%
“…Si+ ions were implanted into the substrates with a fluence of 1015 cm-2 which is sufficient to produce amorphous layers and at energies of 35, 50, 100, 200 and 300 keV, respectively [2][3][4][5][6]91. Isochronal annealing was carried out for 10 sec up to 800 OC in an argon atmosphere using an infrared imaging furnace.…”
Section: Methodsmentioning
confidence: 99%
“…Amorphous layers produced by Si+ ions implantation in InP have been investigated by Rutherford backscattering (RBS) [2-41 and transmission electron microscopy (TEM) [5] and Rarnan scattering [6] measurements. We have so far investigated the annealing behavior of damaged layers by ion implantation in Si [7], GaAs [8] and InP [9] by the piezoelectric PAS.…”
Section: Introductionmentioning
confidence: 99%
“…Irradiation damage on GaAs has already been extensively studied, including the determination of the range of protons and helium ions [8], irradiation induced changes of index of refraction [9], carrier compensation [10], and annealing effects [11], to give some examples. However, for InGaP material we found only a few reports of irradiation experiments, mostly related to the electrical parameters of the devices [12,13] and few about defects in the material [14,15].…”
Section: Introductionmentioning
confidence: 99%