2013
DOI: 10.1016/j.cplett.2013.02.054
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Effects of ion beam-irradiated Si on atomic force microscope local oxidation

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Cited by 2 publications
(2 citation statements)
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“…However, the generality and robustness of the underlying chemical process (anodic oxidation) has transformed Dagata's observation into a reliable a versatile nanolithography approach for patterning and device fabrication 42 . Nanopatterning examples range from the generation of arrays of sub-micrometre lines and dots on crystalline surfaces [66][67][68] , self-assembled monolayers [69][70][71] , polymers 72 to the fabrication of nanoscale templates for the growth of single molecule magnets 73 , proteins 6 , nanoparticles [74][75][76] to the directed self-assembly of block co-polymers 77 , polymer brush nanostructures 78 , carbon nanotubes 79 or semiconductor nanostructures 80 . Examples of nanoscale devices and prototypes include, among others, single photon detectors 81 , photonic nanocavities 82 , quantum devices such as quantum point contacts [83][84] , dots 85,86 , rings 87 and several graphene devices [89][90][91][92] .…”
Section: Oxidation Splmentioning
confidence: 99%
“…However, the generality and robustness of the underlying chemical process (anodic oxidation) has transformed Dagata's observation into a reliable a versatile nanolithography approach for patterning and device fabrication 42 . Nanopatterning examples range from the generation of arrays of sub-micrometre lines and dots on crystalline surfaces [66][67][68] , self-assembled monolayers [69][70][71] , polymers 72 to the fabrication of nanoscale templates for the growth of single molecule magnets 73 , proteins 6 , nanoparticles [74][75][76] to the directed self-assembly of block co-polymers 77 , polymer brush nanostructures 78 , carbon nanotubes 79 or semiconductor nanostructures 80 . Examples of nanoscale devices and prototypes include, among others, single photon detectors 81 , photonic nanocavities 82 , quantum devices such as quantum point contacts [83][84] , dots 85,86 , rings 87 and several graphene devices [89][90][91][92] .…”
Section: Oxidation Splmentioning
confidence: 99%
“…Among many conventional and unconventional nanofabrication techniques, scanning probe lithography (SPL) (Felts et al, 2014;Kim et al, 2013;King et al, 2013;Kurra et al, 2014;Puddy et al, 2013;Garcia et al, 2014;Shaw et al, 2013) has emerged to be a unique tool for materials structuring and patterning with atomic and molecular precision. In SPL, the pattern formation is based on interactions in the tip-sample nanojunction.…”
Section: Introductionmentioning
confidence: 99%