“…They include sol-gel, dip coat, binder, spray, thermal spray, sputtering, chemical vapor deposition, ion plating, and oxygen ion assisted reactive evaporation (OIARE) methods 4,5 . In the method, vacuum evaporation of titanium (Ti) and oxygen ion irradiation are combined to obtain a film with high density and excellent crystalline [6][7][8][9] . In our previous papers, we reported that the OIARE can not only realize very high deposition rate greater than 100 nm/min, but also deposit crystallized TiO 2 films at a low substrate temperature below 100 °C.…”