2007
DOI: 10.2138/am.2007.2648
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Effects of irradiation damage on the back-scattering of electrons: Silicon-implanted silicon

Abstract: Radiation damage in a (initially crystalline) silicon wafer was generated by microbeam ion implantation with 600 keV Si + ions (fl uence 5 × 10 14 ions/cm 2 ). To produce micro-areas with different degrees of damage, 14 implantations at different temperatures (between 23 and 225 °C) were done. The structural state of irradiated areas was characterized using Raman spectroscopy and electron back-scatter diffraction. All irradiated areas showed strong structural damage in surfi cial regions (estimated depth <1 μm… Show more

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Cited by 9 publications
(4 citation statements)
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“…This means that Ti-distribution and CL-activation can potentially be decoupled in zircon. It should be noted that there are also a number of well-documented factors also contribute to CL among minerals, including crystallinity, structure and radiation damage (Nasdala et al, 2007) such that trace element distribution should not solely be considered to correspond to bulk or panchromatic CL intensity.…”
Section: Sem-cl Bse and Ti-distributionmentioning
confidence: 99%
“…This means that Ti-distribution and CL-activation can potentially be decoupled in zircon. It should be noted that there are also a number of well-documented factors also contribute to CL among minerals, including crystallinity, structure and radiation damage (Nasdala et al, 2007) such that trace element distribution should not solely be considered to correspond to bulk or panchromatic CL intensity.…”
Section: Sem-cl Bse and Ti-distributionmentioning
confidence: 99%
“…1). Note that the backscattered electron (BSE) signal intensity in images of zircon single crystals is correlated with structural damage (Fritzsche and Rothemund 1978;Nasdala et al 2006Nasdala et al , 2007; that is, a lower BSE yield means better crystalline order in a given zircon crystal hosting selfirradiation damage.…”
Section: Introductionmentioning
confidence: 99%
“…Lloyd 1987;Prior et al 1999), structural variations, for instance among polymorphs of the same chemical compound (phase contrast; e.g. Mosenfelder 2000;Nasdala et al 2007) and structural defects such as dislocations or micro-porosity (electron channelling contrast; e.g. Kaneko et al 2005;Nasdala et al 2007Nasdala et al , 2009.…”
Section: Introductionmentioning
confidence: 99%
“…Mosenfelder 2000;Nasdala et al 2007) and structural defects such as dislocations or micro-porosity (electron channelling contrast; e.g. Kaneko et al 2005;Nasdala et al 2007Nasdala et al , 2009. Cathodoluminescence imaging reveals the presence of specific structural defects, e.g.…”
Section: Introductionmentioning
confidence: 99%