Effects of Machining Errors on Optical Performance of Optical Aspheric Components in Ultra-Precision Diamond Turning

Li, Yingchun; Zhang, Yaoyao; Lin, Jieqiong; Yi, Allen Y.; Zhou, Xiaoqin

doi:10.3390/mi11030331

Cited by 14 publications

(8 citation statements)

References 31 publications

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“…Traditional ways of monitoring surface roughness cannot be directly used for UPM [15]. Optical components are affected by minute sub variation, and machining errors in UPM can cause cascading faults [16]. The need for the evaluation of the sensors and their applicability for various manufacturing processes are likely to be addressed [17].…”

Section: Figurementioning

confidence: 99%

Monitoring and Predicting the Surface Generation and Surface Roughness in Ultraprecision Machining: A Critical Review

et al. 2021

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The aim of manufacturing can be described as achieving the predefined high quality product in a short delivery time and at a competitive cost. However, it is unfortunately quite challenging and often difficult to ensure that certain quality characteristics of the products are met following the contemporary manufacturing paradigm, such as surface roughness, surface texture, and topographical requirements. Ultraprecision machining (UPM) requirements are quite common and essential for products and components with optical finishing, including larger and highly accurate mirrors, infrared optics, laser devices, varifocal lenses, and other freeform optics that can satisfy the technical specifications of precision optical components and devices without further post-polishing. Ultraprecision machining can provide high precision, complex components and devices with a nanometric level of surface finishing. Nevertheless, the process requires an in-depth and comprehensive understanding of the machining system, such as diamond turning with various input parameters, tool features that are able to alter the machining efficiency, the machine working environment and conditions, and even workpiece and tooling materials. The non-linear and complex nature of the UPM process poses a major challenge for the prediction of surface generation and finishing. Recent advances in Industry 4.0 and machine learning are providing an effective means for the optimization of process parameters, particularly through in-process monitoring and prediction while avoiding the conventional trial-and-error approach. This paper attempts to provide a comprehensive and critical review on state-of-the-art in-surfaces monitoring and prediction in UPM processes, as well as a discussion and exploration on the future research in the field through Artificial Intelligence (AI) and digital solutions for harnessing the practical UPM issues in the process, particularly in real-time. In the paper, the implementation and application perspectives are also presented, particularly focusing on future industrial-scale applications with the aid of advanced in-process monitoring and prediction models, algorithms, and digital-enabling technologies.

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Section: Figurementioning

confidence: 99%

Monitoring and Predicting the Surface Generation and Surface Roughness in Ultraprecision Machining: A Critical Review

et al. 2021

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“…As shown in Figure 1 , the machining errors of a weak-stiffness mirror are divided into clamping errors [ 20 ] and cutting errors [ 21 ]. Clamping errors includes elastic deformation errors and plastic deformation errors, while cutting errors can be divided into system errors and random errors.…”

Section: Error Compensation Strategymentioning

confidence: 99%

High-Precision Machining Method of Weak-Stiffness Mirror Based on Fast Tool Servo Error Compensation Strategy

Dai

Guan

et al. 2021

Micromachines

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Weak-stiffness mirrors are widely used in various fields such as aerospace and optoelectronic information. However, it is difficult to achieve micron-level precision machining because weak-stiffness mirrors are hard to clamp and are prone to deformation. The machining errors of these mirrors are randomly distributed and non-rotationally symmetric, which is difficult to overcome by common machining methods. Based on the fast tool servo system, this paper proposes a high-precision machining method for weak-stiffness mirrors. Firstly, the clamping error and cutting error compensation strategy is obtained by analyzing the changing process of the mirror surface morphology. Then, by combining real-time monitoring and theoretical simulation, the elastic deformation of the weak-stiffness mirror is accurately extracted to achieve the compensation of the clamping error, and the compensation of the cutting error is achieved by iterative machining. Finally, a weak-stiffness mirror with a thickness of 2.5 mm was machined twice, and the experimental process produced a clamping error with a peak to valley (PV) value of 5.2 µm and a cutting error with a PV value of 1.6 µm. The final machined surface after compensation had a PV value of 0.7 µm. The experimental results showed that the compensation strategy proposed in this paper overcomes the clamping error of the weak-stiffness mirror and significantly reduces cutting errors during the machining process, achieving the high precision machining of a weak-stiffness mirror.

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“…The error signal, e(k), passes through the PID controller, yielding the feedback control signal ufb(k), which is then superimposed with the feedforward control signal, uff(k), to obtain the final output signal, u(k). This process is presented in Equation (5). Through the PID control method based on the modified Prandtl-Ishlinskii inverse hysteresis model, the hysteresis effect of the piezoelectric actuator can be theoretically eliminated.…”

Section: Pid Control Based On the Modified Prandtl-ishlinskii Inverse...mentioning

confidence: 99%

“…The real-time compensation of machining errors was shown to improve the machining accuracy of optical mirrors [3,4]. Due to the effects of various machining factors, the machining error surface shape is complex and distributed at various frequencies [5]. Limited by the performance of machining tools and the accuracy of error measurements, the existing compensation machining methods mainly target low-frequency surface errors and cannot handle medium-and high-frequency surface errors.…”

Section: Introductionmentioning

confidence: 99%

Comprehensive Design Method of a High-Frequency-Response Fast Tool Servo System Based on a Full-Frequency Error Control Algorithm

Guan

Dai

et al. 2021

Micromachines

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With the development of optoelectronic information technology, high-performance optical systems require an increasingly higher surface accuracy of optical mirrors. The fast tool servo (FTS) based on the piezoelectric actuator is widely used in the compensation machining of high-precision optical mirrors. However, with the low natural frequency of mechanical structures, hysteresis of the piezoelectric actuators, and phase delay of the control systems, conventional FTS systems face problems such as a low working frequency and a large tracking error. This study presents a method for the design of a high-performance FTS system. First, a flexure hinge servo turret with a high natural frequency was designed through multi-objective optimization and finite element simulations. Subsequently, a composite control algorithm was proposed, targeting the problems of hysteresis and phase delay. The modified Prandtl–Ishlinskii inverse hysteresis model was used to overcome the hysteresis effect and a zero-phase error tracker was designed to reduce the phase error. The experimental results reveal that the tracking error of the designed FTS system was <10% in the full frequency range (0–1000 Hz).

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Effects of Machining Errors on Optical Performance of Optical Aspheric Components in Ultra-Precision Diamond Turning

Cited by 14 publications

References 31 publications

Monitoring and Predicting the Surface Generation and Surface Roughness in Ultraprecision Machining: A Critical Review

Monitoring and Predicting the Surface Generation and Surface Roughness in Ultraprecision Machining: A Critical Review

High-Precision Machining Method of Weak-Stiffness Mirror Based on Fast Tool Servo Error Compensation Strategy

Comprehensive Design Method of a High-Frequency-Response Fast Tool Servo System Based on a Full-Frequency Error Control Algorithm

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