Ultrawide-bandgap (UWBG) deep-ultraviolet photodetectors
have received
great attention due to their versatile applications in the fields
of scientific research, civilian infrastructure, military defense,
etc. In this perspective, we fabricated deep-ultraviolet β-MgGaO
metal–semiconductor–metal photodetectors with interdigital
Pt/Au metal contacts. β-Phase MgGaO ternary alloy thin films
of different Mg atomic percentages were grown using oxygen plasma-assisted
molecular beam epitaxy. Ultrawide bandgaps of 5.03, 5.09, 5.15, and
5.22 eV were achieved for thin films with and without Mg2+ incorporation, and light transmittances of all samples were around
90% in the visible region. Raman spectra indicate that Mg2+ atoms have replaced the position of Ga3+ ions in both
octahedral and tetrahedral chains. The responsivity of the detectors
was investigated. The irradiation wavelength-, temperature-, and power-dependent I–V curves, photocurrent spectra,
and dynamics of the photocurrents were measured. This work suggests
that UWBG β-MgGaO semiconductors have a potential for deep-ultraviolet
photodetectors and other photonic device applications.