2011
DOI: 10.1002/pssa.201127003
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Effects of Mg doping to optimize properties ZnO:Al for the transparent conductive oxide (TCO)

Abstract: In order to achieve good conductivity and high transmittance of transparent conductive oxide (TCO), we attempted to fabricate Mg-doped ZnO:Al (AZO) films and analyzed their structural, electrical, and optical properties. The Mg-doped AZO films were successfully deposited on top of the glass substrates by using an ion beam sputter system. The Mg concentration was controlled by varying the number of MgO chips attached on the AZO target. Inductively coupled plasma mass spectrometry (ICP-MS) was used to determine … Show more

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Cited by 18 publications
(10 citation statements)
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“…All XPS spectra were calibrated by the C 1s peak (284.6 eV) to compensate the charge effect. The addition of Mg to ZnO can either replace Zn 2+ or form MgO secondary phase [28]. In the case of pure ZnO, the Zn 2p 3/2 XPS peak appeared at 1022.03 eV represents the formation of Zn-O bonds while in case of MgZnO films, the Zn 2p 3/2 peak shifted towards higher binding energies, which results from the replacement of Zn 2+ by Mg 2+ and an added Zn-O-Mg binding energy.…”
Section: Resultsmentioning
confidence: 84%
“…All XPS spectra were calibrated by the C 1s peak (284.6 eV) to compensate the charge effect. The addition of Mg to ZnO can either replace Zn 2+ or form MgO secondary phase [28]. In the case of pure ZnO, the Zn 2p 3/2 XPS peak appeared at 1022.03 eV represents the formation of Zn-O bonds while in case of MgZnO films, the Zn 2p 3/2 peak shifted towards higher binding energies, which results from the replacement of Zn 2+ by Mg 2+ and an added Zn-O-Mg binding energy.…”
Section: Resultsmentioning
confidence: 84%
“…For higher concentrations, the resistivity follows an almost linear variation. In this case, the resistivity is affected by oxygen vacancies and the presence of Mg atoms in interstitial sites (Park et al, 2011). Carrier density and mobility diminished as Mg concentration increased, as seen in Fig.…”
Section: Resultsmentioning
confidence: 91%
“…The micro-strain value exhibited maximum magnitude as 1.194 × 10 −3 for Mg = 2% due to the reduced size. The diminution in size by Mg addition at 2% is supported by the substitution of Mg 2+ (ionic radius ~ 0.57 Å) instead of Zn 2+ (ionic radius ~ 0.60 Å) which reduces the volume [21].…”
Section: Xrd-structural Studiesmentioning
confidence: 99%