2021
DOI: 10.1021/acsami.0c17245
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Effects of Moisture-Proof Back Passivation Layers of Al2O3 and AlxTi1–xOy Films on Efficiency Improvement and Color Modulation in Transparent a-Si:H Solar Cells

Abstract: In this study, the back passivation layers (BPLs) were developed to protect hydrogenated amorphous silicon (a-Si:H) thin films of transparent solar cells from humidity and contaminants. Metal oxide compound films with Al (Al2O3) and Ti (Al x Ti y O z (ATO)) were fabricated by plasma-enhanced atomic layer deposition for the BPLs on transparent solar cells. The BPLs of Al2O3 films applied to the transparent solar cells were deposited in different thicknesses to evaluate the performance, and the ATO film thickne… Show more

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Cited by 11 publications
(3 citation statements)
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“…As a result of the PBS and PBIS tests regarding the pristine WSe 2 FET, the unstable electrical properties were ascribed to the adsorption of oxygen and moisture on the WSe 2 surface and charge trapping of photogenerated electron–hole pairs between the WSe 2 and SiO 2 interface. [ 28,32,33 ]…”
Section: Resultsmentioning
confidence: 99%
“…As a result of the PBS and PBIS tests regarding the pristine WSe 2 FET, the unstable electrical properties were ascribed to the adsorption of oxygen and moisture on the WSe 2 surface and charge trapping of photogenerated electron–hole pairs between the WSe 2 and SiO 2 interface. [ 28,32,33 ]…”
Section: Resultsmentioning
confidence: 99%
“…Extensive research has been conducted on aluminum oxide as a thin-film material with diverse applications, including protective coatings [1,2], diffusion barriers [3][4][5], and electronic and optical devices [6][7][8][9]. Crystalline Al 2 O 3 films offer clear advantages in applications that require elevated chemical stability [2,10], specific optical or electronic attributes [7,11,12], and superior mechanical properties [13,14].…”
Section: Introductionmentioning
confidence: 99%
“…We also introduced a hole-transport buffer layer of MoOx to reduce carrier recombination at the p/i interface. Using the optimized MoOx bilayer, the figure of merit (FOM) of the transparent solar cell, which is expressed as the product of the power conversion efficiency (PCE) and transmittance, ,, was determined for the thickness of the absorption layer. Monolithic serial modularization using laser scribing was performed under the highest FOM condition.…”
Section: Introductionmentioning
confidence: 99%