2021
DOI: 10.1149/2162-8777/ac0a40
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Effects of Nb Doping on Crystalline Orientation, Microstructure and Electrical Properties of Non-Stoichiometric PZT Thick Films via Hybrid Sol-Gel Method

Abstract: In this research, a hybrid sol-gel method was used to fabricate Pb(Zr 0.52 Ti 0.48 ) 1−x Nb x O 3 PZT-based piezoelectric thick films. By preparing sol-gel solutions with different Nb concentrations (x = 0%-4%) and mixing them with PZT-5A piezoelectric powders, the microstructure and electrical properties were improved. The X-ray diffraction (XRD) and scanning electron microscope (SEM) results showed that PZT films with 2% Nb doping exhibited high crystallinity and dense surfaces. The maximum dielectric consta… Show more

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“…High performance PZT films were obtained on fluorine-doped tin oxide (FTO)-coated aluminum borosilicate glass (AG) surfaces using a modified sol-gel method (Lee et al, 2021). Liu made Pb .…”
Section: Pzt Piezoelectric Filmsmentioning
confidence: 99%
“…High performance PZT films were obtained on fluorine-doped tin oxide (FTO)-coated aluminum borosilicate glass (AG) surfaces using a modified sol-gel method (Lee et al, 2021). Liu made Pb .…”
Section: Pzt Piezoelectric Filmsmentioning
confidence: 99%