Effects of nitrogen pressure and pulse bias voltage on the properties of Cr–N coatings deposited by arc ion plating

Wan, Xin; Zhao, Shengsheng; Yang, Ying; Gong, Jun; Sun, Chao

doi:10.1016/j.surfcoat.2009.11.021

Cited by 159 publications

(67 citation statements)

References 33 publications

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“…During further increase of the substrate bias, Cr2N (111) becomes the dominant reflection. Changes of bias voltages may also cause reflection shifting in the XRD spectra, and such a peak shift to lower 2θ values was observed for Cr2N (110) with increasing bias voltage, related to the chemical composition change [24,42]. After hydrogenation, the intensities of the peaks of CrN and Cr2N phases changed.…”

Section: Crystalline Structurementioning

confidence: 99%

“…With increasing hydrogen concentration inside the coating, the compressive stresses usually increase due to hydrogen incorporation into the open volume defects Chu et al [49] found that the residual stress was clearly related to the negative bias voltages, and high hardness is a result of such high residual stress. The compressive stress arises because of a process called "atomic peening", in which some atoms squeeze into the lattices directly, causing internal stress and increasing the coating hardness [24,50]. However, further increase of the bias voltage can lead to reduced hardness, because the superfluous bombarding energies can cause lattice relaxation and recrystallization.…”

Section: Mechanical Propertiesmentioning

confidence: 99%

“…However, further increase of the bias voltage can lead to reduced hardness, because the superfluous bombarding energies can cause lattice relaxation and recrystallization. Thus, the crystalline defects will be annihilated and the reduction of hardness is induced [24]. Lin et al [51] presented the maximum of stress for bias voltages of about 100 V.…”

Section: Mechanical Propertiesmentioning

confidence: 99%

“…A negative bias voltage applied to the substrate can influence nucleation and growth kinetics during coating growth, and will subsequently modify the microstructure and mechanical properties of the coatings [17,[23][24][25][26][27][28]. Wan et al [24] presented the evolution of the CrN phase structure with raising bias voltage with a maximum of hardness and residual stress for the coating deposited at approximately 100 V. Warcholinski et al [18] measured the optimal hardness and elastic modulus for coatings deposited at 150 V, whereas the best adhesion occurred at low biases (10-70 V).…”

Section: Introductionmentioning

confidence: 99%

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Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

et al. 2018

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In the current work, the microstructure, hydrogen permeability, and properties of chromium nitride (CrN x ) thin films deposited on the Inconel 718 superalloy using direct current reactive sputtering are investigated. The influence of the substrate bias voltage on the crystal structure, mechanical, and tribological properties before and after hydrogen exposure was studied. It was found that increasing the substrate bias voltage leads to densification of the coating. X-ray diffraction (XRD) results reveal a change from mixed fcc-CrN + hcp-Cr 2 N to the approximately stoichiometric hcp-Cr 2 N phase with increasing substrate bias confirmed by wavelength-dispersive X-ray spectroscopy (WDS). The texture coefficients of (113), (110), and (111) planes vary significantly with increasing substrate bias voltage. The hydrogen permeability was measured by gas-phase hydrogenation. The CrN coating deposited at 60 V with mixed c-CrN and (113) textured hcp-Cr 2 N phases exhibits the lowest hydrogen absorption at 873 K. It is suggested that the crystal orientation is only one parameter influencing the permeation resistance of the CrN x coating together with the film structure, the presence of mixing phases, and the packing density of the structure. After hydrogenation, the hardness increased for all coatings, which could be related to the formation of a Cr 2 O 3 oxide film on the surface, as well as the defect formation after hydrogen loading. Tribological tests reveal that hydrogenation leads to a decrease of the friction coefficient by up to 40%. The lowest value of 0.25 ± 0.02 was reached for the CrN x coating deposited at 60 V after hydrogenation.

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Section: Crystalline Structurementioning

confidence: 99%

Section: Mechanical Propertiesmentioning

confidence: 99%

Section: Mechanical Propertiesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

et al. 2018

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“…For obtaining the accurate experiment values, the results were collected as an average of 20 measurement readings. Residual stress values were estimated through the stress tester machine (J&L Advanced Plasma Technology™, Ansan, Korea) that applied a laser and calculated with the Stoney equation [26].…”

Section: Composition and Deposition Ratementioning

confidence: 99%

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

et al. 2017

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CrN and Cr-Al-Si-N coatings were deposited on SUS304 and Si-wafers by a hybrid coating system. The Cr and Al-Si target were connected to the cathode arc ion plating (AIP) and high power impulse magnetron sputtering (HiPIMS), respectively. Various Al and Si contents in the coatings were obtained by changing the power of Al-Si target from 0 to 1 kW. The results demonstrated a face-centered cubic structure in all of the coatings. With increasing Al-Si target power, both the density and mean diameter of the macroparticles on the coating surface declined. As Al and Si contents increased, the microstructure of the Cr-Al-Si-N coatings evolved from a dense column structure, to a finer grain column structure, and then to a compact granular-like structure. The hardness of the coatings increased from 21.5 GPa for the pure CrN coating, to a maximum value of~27 GPa for the Cr-Al-Si-N coating deposited at 0.4 kW, which was mainly attributed to the solid solution strengthening and increased residual stress. The addition of Al and Si contents led to enhanced wear resistance against alumina balls at both room and elevated temperatures. Meanwhile, the Cr-Al-Si-N coatings also exhibited an excellent resistance to high-temperature oxidation at 800 and 1000 • C, and improved corrosion resistance, as compared with CrN coatings.

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Corrosion Resistance and Structure of Cr−O−N Coatings Formed in Vacuum Arc Plasma Fluxes With PIIID

Kuprin,

Rostova,

Reshetnyak

et al. 2024

Materials & Corrosion

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Cr−O−N‐based vacuum arc coatings are very promising for the wear and corrosion protection of various steel parts. The aim of the work was to determine the effect of frequency and amplitude of the pulsed bias voltage (UB) on the elemental and phase composition, mechanical, and corrosion properties of Cr−O−N coatings. They have an amorphous structure with embedded nanosized solid solution crystallites based on CrN with a cubic structure and Cr2O3 with a rhombohedral structure. The increase in the bias voltage results in a reduction in the grain size of the Cr2O3 and CrN phases by about four times to about 5 nm, as well as a change in the CrN phase content in the coating. The lattice parameter increases slightly for the Cr2O3 phase but decreases for the CrN phase. The increase in the pulse frequency results in an increase in the CrN phase content in the coating and the lattice constant of both phases and a slight decrease in the crystallite size. The hardness of Cr−O−N coatings slightly increased with the UB from 26 ± 1 GPa (DC) to 28 ± 1 GPa (−300 V, pulsed), and the elastic modulus ranges from 290 to 310 GPa. The greatest changes were observed in corrosion resistance. With an increase in the bias voltage and pulse frequency, the corrosion current of Cr−O−N coatings on steel in 3% NaCl solution decreased by three orders of magnitude compared to coatings deposited at DC voltage and by five orders of magnitude compared to the base steel. Therefore, the use of a pulsed bias voltage with a frequency of at least 10 kHz and an amplitude of 700 V can significantly increase the corrosion resistance of Cr−O−N coatings on steel substrates.

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Effects of nitrogen pressure and pulse bias voltage on the properties of Cr–N coatings deposited by arc ion plating

Cited by 159 publications

References 33 publications

Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

Corrosion Resistance and Structure of Cr−O−N Coatings Formed in Vacuum Arc Plasma Fluxes With PIIID

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