The breakdown jitter characteristic of a self-triggered pre-ionization switch that works under pulses with the rising time of about one hundred nanoseconds was improved based on the probability distribution model of electron avalanche's initiation. Contrary to what we might imagine, premature pre-ionization nearly brought about no improvement on the breakdown jitter characteristic. To reduce the switch jitter, analysis of the probability distribution model indicated that the generating rate of initial electrons should maintain a high value when the electric field in the gap was high enough to initiate an effective electron avalanche. Experimental results proved that adjusting the breakdown time of the trigger gap or letting the electrons in the arc channel of the trigger gap become a steady source of initial electrons could both reduce the breakdown time delay jitter to 1ns-2ns when the breakdown time was about 95% of the peak time, this means that high energy transfer efficiency and low jitter were realized simultaneously.INDEX TERMS Gas switch, nanosecond pulse, pre-ionization, self-triggering, time delay jitter.