Effects of Oxygen Addition and Treating Distance on Surface Cleaning of ITO Glass by a Non-Equilibrium Nitrogen Atmospheric-Pressure Plasma Jet

Abstract

Effects of oxygen addition and treating distance on cleaning organic contaminants on stationary and non-stationary (1-9 cm/s) ITO glass surfaces by a parallel-plate nitrogen-based dielectric barrier discharge (DBD) are investigated experimentally; the DBD is driven by a 60 kHz bipolar quasi-pulsed power source. The results show that two regimes of favorable operating condition for improving the hydrophilic property of the surface (reducing the contact angle from 84°to 25-30°) are found. The measured spatial distribution of NO-c UV emission, O 3 concentration and OES spectra are shown to strongly correlate with the measured hydrophilic property. At the near jet downstream locations (z \ 10 mm), the metastable N 2 ðA 3 P þ u Þ and photo-induced dissociation of ozone play dominant roles in cleaning the ITO glass surface; while at the far jet downstream locations (z [ 10 mm), where the ratio of oxygen to nitrogen is lower, only the long-lived metastable N 2 ðA 3 P þ u Þ plays a major role in cleaning the ITO glass surface.

Rapid Atmospheric-Pressure-Plasma-Jet Processed Porous Materials for Energy Harvesting and Storage Devices

“…The gap of the quartz tube from the substrate also greatly influences the substrate temperature and substrate temperature gradient. When the treated materials are in an organic base, the involvement of oxidants in the APPJs can increase the oxidation rates of organic compounds [23,24,30]. A hole on the side of the quartz tube is beneficial when treating materials containing organic compounds.…”

Fluid Modeling of a Nitrogen Atmospheric-Pressure Planar Dielectric Barrier Discharge Driven by a Realistic Distorted Sinusoidal Alternating Current Power Source

“…A distorted sinusoidal voltage waveform having a peak value of 6.6 kV with a frequency of 60 kHz was used to sustain the discharge throughout the study unless otherwise specified. A related experimental setup has been described in detail by Chiang et al 3) and is not repeated here for brevity. Because the input voltage was not a sinusoidal waveform, it was fitted by a Fourier series with 18 terms using 60 kHz as the fundamental frequency in the simulation.…”

“…This type of discharge is widely used in numerous applications in the fields of pollution control and surface treatment among others. [1][2][3] Thus, understanding of the fundamental plasma physics of nitrogen DBD is important in further improving the use and design of nitrogen DBD sources through simulations which are efficient and low-cost.…”

Influence of Ca/Al Ratio on Properties of Amorphous/Nanocrystalline Cu–Al–Ca–O Thin Films

“…P ‐type oxides are strongly desired primarily owing to development of all oxide based p–n junction devices and CMOS technology . However, the development of p ‐type TCOs considerably lags that of n ‐type ones; many n ‐type TCOs such as indium tin oxide (ITO) and InGaZnO are already used in industry …”