Effects of oxygen flow velocity on the sintering properties of ITO targets

Mei, Fangsheng; Qin, Kai; Yuan, Tiechui; Li, Ruidi; Liu, Langming; Chen, Lisan; Wei-shang, Zhao

doi:10.1007/s10854-017-7339-y

Cited by 17 publications

(1 citation statement)

References 19 publications

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“…ITO (Indium tin oxide) films are widely used as transparent electrodes in the field of various optoelectronic devices, such as liquid crystal displays (LCD), organic light emitting diodes (OLED), touch panels (TP), thin film solar cells, antistatic conductive films, and automotive applications, et al…”

Section: Introductionmentioning

confidence: 99%

Microstructure, grain orientation, and properties of ITO ceramics sintered with various heating rates

Mei

Qin

Mei³

et al. 2018

Int J Applied Ceramic Tech

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In this study, the microstructure, grain orientation, electrical resistivity, nanohardness, and fracture strength were systematically investigated in ITO ceramics sintered with different heating rates. It was found that ITO ceramics sintered at 1600°C consist of main phase (In 2 O 3 ) and secondary phase (In 2 SnO 5 ) and the distributions of coarse grains with high indium content and fine grains with high tin content are interval. The higher heating rate was found to refine the grain size and increase the {1000} textured secondary phase. The increase in electrical resistivity of ITO ceramics was due to the decrease in oxygen vacancies caused by the reducing oxide decomposition. Moreover, the nanohardness of fine grains was found to be higher than that of coarse grains due to the reinforcement effect of Sn element. Besides, the increase of heating rate is beneficial to enhance the fracture strength due to the higher resistance of grain boundary to fracture propagation and the predominantly intergranular fracture. K E Y W O R D Selectrical resistivity, fracture strength, grain orientation, In 2 SnO 5 , nanohardness

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Section: Introductionmentioning

confidence: 99%