Effects of Plasma Treatment on the Composition and Phase Changes of Sputter-Deposited SnO<sub><i>x</i></sub> Thin Films

Seo, Han Byeol; Bae, Byung Seong; Bang, Hyo In; Yun, Eui‐Jung

doi:10.1166/jnn.2020.17225

Cited by 5 publications

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“…Referring to the same method, the chemical formula of the SnO x -60, SnO x -120, and SnO x -180 samples is (SnO) 0.66 (SnO 2 ) 0.34 ·0.66H 2 O, (SnO) 0.52 (SnO 2 ) 0.48 ·0.40H 2 O, and (SnO) 0.23 (SnO 2 ) 0.77 ·0.27H 2 O, respectively. For SnO x -RT and SnO x -60 samples, the Sn(II)/Sn(IV) molar ratios were determined to be 2.57 and 1.94, respectively, which emerges as the highest value ever reported in results for SnO x catalysts. , Moreover, it is noted that the Sn(II)/Sn(IV) molar ratio in SnO x -60 is close to that of Sn 3 O 4 , which predicts similar band gap energy, band edge potential, as well as photocatalytic performance.…”

Section: Resultsmentioning

confidence: 72%

“…For SnO x -RT and SnO x -60 samples, the Sn(II)/Sn(IV) molar ratios were determined to be 2.57 and 1.94, respectively, which emerges as the highest value ever reported in results for SnO x catalysts. 44,45 Moreover, it is noted that the Sn(II)/Sn(IV) molar ratio in SnO x -60 is close to that of Sn 3 O 4 , which predicts similar band gap energy, band edge potential, as well as photocatalytic performance. Further, the coordination environment and valence state of Sn in the synthesized non-stoichiometric ratio SnO x were analyzed by Mossbauer spectra.…”

Section: T H Imentioning

confidence: 75%

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Structural Insight on Defect-Rich Tin Oxide for Smart Band Alignment Engineering and Tunable Visible-Light-Driven Hydrogen Evolution

Song

Zhao

et al. 2020

Inorg. Chem.

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Herein, a series of defect-rich tin oxides, Sn x O y , were synthesized with tunable Sn2+/Sn4+ composition ratio and defect chemistry, aiming to explore the impact of local structural modulation, non-stoichiometric chemistry, and defective center on the modulation of band gap values, band edge potential positions, and photocatalytic hydrogen evolution performance. The phase structure, morphology, surface component, and photoelectric properties were analyzed by multiple testing methods. The modulation of the Sn2+/Sn4+ molar ratio was analyzed by X-ray photoelectron spectroscopy and the spectra of Mossbauer and electron spin resonance, which indicated the existence of interstitial tin and oxygen vacancy, predicting a highly disordered local structure. In addition, the photocatalytic activity was evaluated by water splitting for hydrogen production under visible light. The optimal photocatalytic activity toward H2 production rate reached 58.6 μmol·g–1·h–1 under visible light illumination. However, the photocatalytic activity gradually decreased with an increase of synthetic temperature. Much higher Sn2+/Sn4+ molar ratio in the present defective tin oxide gave rise to more negative band edge potentials for hydrogen production. Meanwhile, the driving force was decreased with the diminished Sn2+. Large amounts of hydroxyl groups, Sn2+, and relatively negative potential of conduction band in non-stoichiometric Sn x O y play critical roles in visible light harvesting and photocatalytic water splitting. Furthermore, the relationships among crystal structure, electronic properties, and photocatalytic activities were clarified by theoretical calculation. This work provides a novel strategy for the development of highly efficient photocatalytst by regulating the internal electronic structure and surface defects.

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Section: Resultsmentioning

confidence: 72%

Section: T H Imentioning

confidence: 75%

Structural Insight on Defect-Rich Tin Oxide for Smart Band Alignment Engineering and Tunable Visible-Light-Driven Hydrogen Evolution

Song

Zhao

et al. 2020

Inorg. Chem.

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“…8, кривая 1, прозрачность пленки, полученной из раствора с концентрацией ионов олова 0,12 моль/л, меняется с 90,1 до 87,4 %. Прозрачность остальных образцов сильнее зависит от длительности воздействия водородной плазмы [21][22][23]. Прозрачность образца, полученного из раствора с концентрацией ионов олова 0,2 моль/л, меняется с 88,0 до 84,2 %.…”

Section: образцы и методы исследованияunclassified

Investigation of the effect of short-term exposure of oxygen and hydrogen plasma on the composition and structure of thin tin dioxide films

Tompakova

Polisan

2021

Izv. vysš. učebn. zaved., Mater. èlektron. teh.

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Modern technologies cannot do without the production of thin films of tin dioxide, which are most widely used mainly in three areas: as transparent electrodes, catalysts, and solid-state sensors of various gases. Their use as transparent electrodes is associated with a high transmittance of tin dioxide layers in the optical range, as well as with their low electrical resistivity. The effect of short-term exposure to plasma on the composition and structure of thin films of tin dioxide obtained from a solution of pentahydrate tin tetrachloride in 97% ethanol with different concentrations of tin ions is considered. A linear character of the dependence of the thickness of the tin dioxide SnO2 films on the concentration of the solution and the number of deposited layers is revealed. A decrease in the electrical resistance of the films with an increase in the concentration of the initial solution and an increase in the number of layers was found. It is shown that the treatment of SnO2 films with hydrogen plasma makes it possible to reduce their electrical resistance of the films without decreasing the transparency. Treatment with oxygen plasma reduces the transparency of the SnO2 films, and the resistance of the films increases with an increase in the duration of such treatment.

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“…Among the various methods used to improve the functional properties of metal oxide layers, plasma treatment is of particular interest [11][12][13]. Analysis of changes in the optical parameters and structural characteristics of tin dioxide after plasma treatment allows us to better understand the dynamics of changes in the physical properties of thin films of tin dioxide.…”

Section: Introductionmentioning

confidence: 99%

The effect of three-minute exposure of oxygen plasma on the properties of tin oxide films

Dmitriyeva¹,

Lebedev²,

Grushevskaya³

et al. 2020

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Research devoted to the effect of three-minute exposure of oxygen plasma on the properties of tin oxide films investigation. The films were obtained by sol-gel method from five-water tin tetrachloride solution. The concentration of tin ions in the SnCl4/EtOH film-forming system was 0.14 mol/l. The solution system was deposed on the glass substrate by carring out a modified dipping method. Plasma treatment was performed at a pressure of 6.5 Pa and a power of about 20 Watts. The frequency of the oscillations produced by the generator was 27.12 ± 0.6 % MHz as well. The temperature of the samples during processing did not exceed 100 ºC. As a result of the formation of tin oxide (II), the film transmittance decreased after treatment with oxygen plasma. The width of the electric forbidden zone of the obtained samples was calculated, which was 3.95 eV for glass and 3.79 eV for film. The resistance of the films was determined by 10 measurements on different parts of the samples. The film without processing has a resistance of about 4255 ± 1158 kΩ, after processing, the resistance decreased by 25 times and amounted to 167 ± 26 kΩ. A decrease in resistance indicates an increase in the concentration of charge carriers in the sample. The resulting SnO is a semiconductor that lowers the transmittance of the studied films and contributes to reducing their resistance. X-ray structural analysis of the samples was also performed. After processing in oxygen plasma, the intensity of reflection from the (110) plane have increased. It should be noted that the number of planes with (101) indexes has decreased. The study of the sample surface showed the destructive nature of three-minute exposure by oxygen plasma. Keywords: thin films, SnO2, sol-gel method, oxygen plasma treatment, transparency, structure, resist

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Effects of Plasma Treatment on the Composition and Phase Changes of Sputter-Deposited SnO_x Thin Films

Cited by 5 publications

References 0 publications

Structural Insight on Defect-Rich Tin Oxide for Smart Band Alignment Engineering and Tunable Visible-Light-Driven Hydrogen Evolution

Structural Insight on Defect-Rich Tin Oxide for Smart Band Alignment Engineering and Tunable Visible-Light-Driven Hydrogen Evolution

Investigation of the effect of short-term exposure of oxygen and hydrogen plasma on the composition and structure of thin tin dioxide films

The effect of three-minute exposure of oxygen plasma on the properties of tin oxide films

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Effects of Plasma Treatment on the Composition and Phase Changes of Sputter-Deposited SnOx Thin Films

Cited by 5 publications

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Structural Insight on Defect-Rich Tin Oxide for Smart Band Alignment Engineering and Tunable Visible-Light-Driven Hydrogen Evolution

Structural Insight on Defect-Rich Tin Oxide for Smart Band Alignment Engineering and Tunable Visible-Light-Driven Hydrogen Evolution

Investigation of the effect of short-term exposure of oxygen and hydrogen plasma on the composition and structure of thin tin dioxide films

The effect of three-minute exposure of oxygen plasma on the properties of tin oxide films

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Effects of Plasma Treatment on the Composition and Phase Changes of Sputter-Deposited SnO_x Thin Films