Effects of radiation on MEMS

Abstract

The sensitivity of MEMS devices to radiation is reviewed, with an emphasis on radiation levels representative of space missions. While silicon and metals generally do not show mechanical degradation at the radiation levels encountered in most missions, MEMS devices have been reported to fail at doses of as few krad, corresponding to less than one year in most orbits. Radiation sensitivity is linked primarily to the impact on device operation of radiation-induced trapped charge in dielectrics, and thus affects most strongly MEMS devices operating on electrostatic principles. A survey of all published reports of radiation effects on MEMS is presented. The different sensing and actuation physical principles and materials used in MEMS are compared, leading to suggested was to increase radiation tolerance by design, for instance by choice of actuation principle or by electrical shielding of dielectrics.

Carbeto de Silício como Material Base para Sensores MEMS de Uso Aeroespacial: Uma Visão Geral

“…A Figura 4 mostra uma visão geral do efeito da radiação sobre materiais e dispositivos [13]. A interação entre a radiação e o silício resulta em ionização e danos de deslocamento atômico.…”

“…Em 2011, H. R. Shea publicou um artigo sobre o efeito da radiação em dispositivos MEMS baseados em silício [13]. De acordo com os resultados obtidos, ele concluiu que a degradação dos dispositivos devido à radiação é uma complexa interação de alterações nos materiais e no princípio físico de atuação (piezo, capacitivo, eletromagnético e eletrotérmico e ótico).…”

“…Logo, se o efeito capacitivo é utilizado para detectar a frequência de ressonância, uma grande alteração dos parâmetros do dispositivo pode ser observada. Se um princípio ótico (como no vibrômetro laser Doppler) for usado, nenhuma mudança será observada [13].…”

Design of optical reconfigurable balanced ternary arithmetic logic unit using MEMS based design

“…By controlling these switches maintained by some rules, we have the provision of release light-paths towards the destination [54]. Also MEMS is very light and suitable for operation in harsh environment of engines and inside nuclear reactors or in space applications [55][56][57][58]. It has been proved that MEMS with Si-CMOS enables a new low cost high performance nano-electromechanical device recently [59].…”

The Performance of Silicon Solar Cells Exposed to a Simulated Low Earth Orbit Plasma Environment: Laboratory Ground Tests

“…Because other environmental factors may need consideration, understanding of a physical model provides a basis for studying their behavior in a complex environment. 1 In particular, solar cells and arrays may become substantially more complex and contain materials which are affected in different ways by radiation damage. 2,3 Solar cells on satellites in low earth orbit (LEO) are susceptible to damage because the electron belts trapped at lower altitudes tend to increase the level of radiation.…”