“…The main paths are generation at the surface (Schottky defect formation) and generation in the volume (Frenkel pair formation). In the first case, to consider the vacancy formation, it is necessary to take into account the state of the surface (e.g., the coating type and structure [ 34 , 35 , 36 , 37 , 38 ]) and the free surface exchange by atoms and molecules with the environment [ 39 , 40 , 41 , 42 ]. For most semiconductor materials, spontaneous Frenkel pair formation is considered an unlikely source of vacancies thanks to the high energy of forming two defects as a tight pair.…”