Self-assembled monolayers (SAMs) are a very promising construct for monomolecular thin films with various practical applications because they are very amenable to surface modification and functionalization of metal surfaces.1-6 Alkanethiol SAMs on gold surfaces have been thoroughly studied by a number of research groups, and their structural properties have been well characterized. Organic thiols are prone to easily oxidize to disulfides or other oxidized species that can affect the formation and structure of SAMs. 7,8 The presence of disulfides or oxidized compounds in thiol samples often yields poorly ordered SAMs containing a high defect density and disordered phases. An approach that minimizes undesirable thiol oxidation is the use of a protected thiol that is deprotected in situ before or during SAM formation. The protection of thiol groups can be readily accomplished by acetylation. SAMs derived from acetyl protected thiols (thioacetates) on gold have usually been formed via an in situ deprotection process of the acetyl group in strong acidic or basic solutions.9-11 Other deprotection techniques have also been developed that use organic compounds such as triethylamine, 12 tetrabutylammonium cyanide, 13 and 1,8-diazabicyclo[5.4.0]undec-7-ene, 8 and organic SAMs with a high degree of structural order have been successfully constructed in solutions containing these deprotection reagents.In contrast, there have been only limited reports of investigations into the direct adsorption of thioacetyl-protected organic molecules on gold in solution without any deprotection reagents. 8,9,[13][14][15] It has been observed that the direct adsorption of alkanethioacetates (ATAs) on gold in solution generates loosely packed and disordered SAMs compared to the corresponding alkanethiols (ATs). 8,13,15 A kinetics study showed that the adsorption rate is slower for ATAs in pure solvents than for ATs. 14 Fully covered monolayers from aromatic thioacetates were formed after a longer immersion period of several days or in a concentrated 30 mM solution.9 In general, organic thiol SAMs can be formed by both solution and vapor phase deposition, and both deposition methods yield identical SAM structures containing the hexagonal (√3 × √3)R30 o or c(4 × 2) structure at saturation coverage. 1,3,16 To the best of our knowledge, however, there have been no reports describing organic thioacetate SAMs on gold grown by vapor deposition.In this study, to understand the formation of thioacetate SAMs on gold depending on deposition method, we directly compared the surface structures of the acetyl-protected octylthioacetate (OTA, CH 3 (CH 2 ) 7 SCOCH 3 ), SAMs on Au (111) The STM images in Figure 1 clearly show considerable structural differences between OTA SAMs on Au(111) grown from solution and vapor deposition at 50 o C for 24 h. OTA SAMs grown from solution were mainly composed of disordered phases containing many vacancy islands (VIs, dark holes), as shown in Figure 1a. The surface structures of these OTA SAMs were nearly identical to ...