2004
DOI: 10.1016/j.jmmm.2004.04.027
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Effects of spacer layer on growth, stress and magnetic properties of sputtered permalloy film

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Cited by 36 publications
(22 citation statements)
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“…Coercive fields also increase with thickness measuring values around 25 Oe for thicknesses above 180 nm. 2 MFM measurements show a stripe domain pattern that proves the existence of an anisotropy component perpendicular to the sample plane ( Figure 3).…”
Section: Resultsmentioning
confidence: 81%
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“…Coercive fields also increase with thickness measuring values around 25 Oe for thicknesses above 180 nm. 2 MFM measurements show a stripe domain pattern that proves the existence of an anisotropy component perpendicular to the sample plane ( Figure 3).…”
Section: Resultsmentioning
confidence: 81%
“…2 Base pressure was lower than 10 À6 mbar, and the distance from target to substrate was about 15 cm. The growing rates were 0.14 and 0.03 nm/s for Py and Mo, respectively.…”
Section: Methodsmentioning
confidence: 99%
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“…The base pressure of the magnetron sputtering system was 4.6 mT. The deposition produced soft, ferromagnetic permalloy films with high permeabilities (m r $ 1000) at H¼0 Oe, low coercivities ($ 0.1 Oe) and low intrinsic stress [20,21]. The surface roughness was on the order of nanometers, as determined by a Veeco Nanoman atomic force microscope (AFM).…”
Section: Writing Informationmentioning
confidence: 99%