2018
DOI: 10.1016/j.materresbull.2018.04.054
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Effects of sputtering pressure on microstructure and mechanical properties of ZrN films deposited by magnetron sputtering

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Cited by 31 publications
(13 citation statements)
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“…ZrN is also available in a wide range of colors, so it has a wide range of prospects in the field of decorative coatings [ 3 ]. There are several ways to prepare ZrN coatings, such as vacuum cathodic arc evaporation plating [ 4 , 5 ], DC reactive magnetron sputtering plating [ 6 , 7 ], pulsed laser deposition [ 8 ], and ion beam assisted deposition [ 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…ZrN is also available in a wide range of colors, so it has a wide range of prospects in the field of decorative coatings [ 3 ]. There are several ways to prepare ZrN coatings, such as vacuum cathodic arc evaporation plating [ 4 , 5 ], DC reactive magnetron sputtering plating [ 6 , 7 ], pulsed laser deposition [ 8 ], and ion beam assisted deposition [ 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…At present, some metals, alloys, and steels are protected with ceramic coatings for various applications (Akahoshi et al, 2020;Aouadi et al, 2020;Selvaraj et al, 2020;Attarzadeh et al, 2021;Wang et al, 2021). Attempts are being made to use nitride ones for improving functional properties of nuclear fuel claddings made of zirconium alloys (Khatkhatay et al, 2014;Lin et al, 2018;Xiao et al, 2018;Gao et al, 2019;Meng et al, 2019;Tang et al, 2019;Krejčí et al, 2020;Ham et al, 2021). However, the incompatibility of material characteristics at the metal/ ceramic interfaces (Howe et al, 1993;Liu et al, 2004;Mu et al, 2017;Guan et al, 2020;Zhao et al, 2021), residual stresses in the coatings (Lyubimov et al, 1992;Xiao et al, 2018;Mehboob et al, 2020;Muraoka and Tateno, 2020), as well as the morphology (roughness) of the surface layers of the substrate (Lin et al, 2018;Xiao et al, 2018) result in their low adhesion.…”
Section: Introductionmentioning
confidence: 99%
“…Attempts are being made to use nitride ones for improving functional properties of nuclear fuel claddings made of zirconium alloys (Khatkhatay et al, 2014;Lin et al, 2018;Xiao et al, 2018;Gao et al, 2019;Meng et al, 2019;Tang et al, 2019;Krejčí et al, 2020;Ham et al, 2021). However, the incompatibility of material characteristics at the metal/ ceramic interfaces (Howe et al, 1993;Liu et al, 2004;Mu et al, 2017;Guan et al, 2020;Zhao et al, 2021), residual stresses in the coatings (Lyubimov et al, 1992;Xiao et al, 2018;Mehboob et al, 2020;Muraoka and Tateno, 2020), as well as the morphology (roughness) of the surface layers of the substrate (Lin et al, 2018;Xiao et al, 2018) result in their low adhesion. This challenge can be solved by optimizing the deposition parameters (Lin et al, 2018;Xiao et al, 2018;Tang et al, 2019;Krejčí et al, 2020).…”
Section: Introductionmentioning
confidence: 99%
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“…Amongst other characteristics, transition metal nitrides and oxynitrides have exhibited interesting mechanical [4,5], optical [6,7], anticorrosion [8] and tribological [9] properties. Transition metal oxynitrides have been developed by several authors [10][11][12][13] since, due to their binding characteristics and their properties, they can be fine-tuned to originate nitrides and the corresponding oxide.…”
Section: Introductionmentioning
confidence: 99%