2006
DOI: 10.1063/1.2392746
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Effects of substrate on the dielectric and tunable properties of epitaxial SrTiO3 thin films

Abstract: Tunable dielectric thin films of SrTiO 3 ͑STO͒ were prepared on different single-crystalline substrates, including insulating LaAlO 3 , conductive Nb-doped STO ͑NSTO͒, and superconducting YBa 2 Cu 3 O 7−␦ . Substrate effects including morphology, orientation, and lattice mismatch induced strains were investigated. We found that a change of substrate used for STO thin films can strongly affect the dielectric properties of STO thin films in terms of dielectric constant, loss tangent, and tunability. Effects of s… Show more

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Cited by 23 publications
(13 citation statements)
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“…capacitances measured in 5 nm devices as they are also shown in literature to strongly affect the relative permittivity [51][52][53][54]. While for 50 nm devices the capacitance and permittivity are already close to the expected values for bulk SrTiO 3 .…”
supporting
confidence: 74%
“…capacitances measured in 5 nm devices as they are also shown in literature to strongly affect the relative permittivity [51][52][53][54]. While for 50 nm devices the capacitance and permittivity are already close to the expected values for bulk SrTiO 3 .…”
supporting
confidence: 74%
“…According to the Thomas-Fermi theory, the induced volume charge density in LSMO decays exponentially moving away from the surface like 0 exp͑−z / LSMO ͒, where z is the distance from the surface and 0 = / LSMO is the "surface" modification of the charge density. Assuming STO = 200, as obtained from the measurement of the time discharge of the capacitance associated with the FED and in agreement with data reported in literature, [22][23][24][25] we find 0 = 2.45ϫ 10 2 C / cm 3 when 2.5 V are applied. Electrons are then injected in LSMO with a concentration being 1.5ϫ 10 21 cm −3 at the interface with STO and ϳ2 ϫ 10 20 cm −3 one unit cell away from the interface, where the second plane of Mn atoms is placed if we suppose a MnO 2 termination of the LSMO film.…”
Section: Discussionsupporting
confidence: 86%
“…On the other hand, the host of SrTiO 3 (STO) here is known as an incipient ferroelectric and foundational material of oxide-based heterostructures 16 . STO thin films with tunable dielectric properties associated with structural phase transition under strain have been systematically studied 17 18 . Our recent work indicates that STO is also a suitable NIR phosphor matrix for Ni 2+ ions 19 .…”
mentioning
confidence: 99%