Effects of substrate temperature on the structural, morphological, electrical and optical properties of Al and Ga co-doped ZnO thin films grown by DC magnetron sputtering

Zhu, Ke; Yang, Youliang; Song, Weijie

doi:10.1016/j.matlet.2015.01.130

Cited by 45 publications

(18 citation statements)

References 20 publications

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“…The observed increase in the local surface conductivity of the AZO films from 303 to 623 K is found to follow their bulk conductivity behaviour, where, bulk electrical resistivities ( ρ ) are found to decrease from 420 × 10 −4 Ω cm at T s = 303 K to 9.35 × 10 −4 Ω cm at T s = 623 K (Table ), mainly associated with an increase in Al dopants, Zn interstitials and oxygen vacancies leading to higher n e (Table ) . It should be noted that the thermally induced increase in kinetic energy of the Al dopants is higher at higher T s , thus substituting higher number of Al atoms in ZnO lattice, as evidenced with an increase in micro strain ( ε ) in these AZO films with increasing T s from −1.73 × 10 −3 at T s = 303 K to −1.88 × 10 −3 at T s = 623 K (Table ).…”

Section: Resultsmentioning

confidence: 82%

Interpreting the conductive atomic force microscopy measured inhomogeneous nanoscale surface electrical properties of Al-doped ZnO films

Patel

Panda

2016

Surf. Interface Anal.

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In this work, conductive atomic force microscopy is used to study the inhomogeneous surface electrical conductivity of Al-doped ZnO thin films at a nanoscale dimension. To this end, Al-doped ZnO films were deposited onto the soda lime glass substrates at substrate temperature (T s ) varying from 303 to 673 K in radio frequency magnetron sputtering. The obtained local surface electrical conductivity values are found to be influenced by their bulk electrical resistivity, surface topography and tip geometry. Further, the average (local) surface conductivity from the film surface is found to increase with increasing T s from 303 to 623 K, beyond which they decrease until 673 K.

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Section: Resultsmentioning

confidence: 82%

Interpreting the conductive atomic force microscopy measured inhomogeneous nanoscale surface electrical properties of Al-doped ZnO films

Patel

Panda

2016

Surf. Interface Anal.

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“…Thus, the composition of A3.0G1.0ZO was found to be optimal with respect to electrical properties, showing both the highest measured mobility and charge carrier density. Whilst the charge carrier density was lower than that reported elsewhere by up to four times, 38,39,43,44 this can in turn rationalize the exceptionally high carrier mobility (10 times higher than that reported by the best performing AGZO materials) [38][39][40][41][42][43][44] in part due to reduced scattering effects from other charge carriers.…”

Section: Electrical Characterizationmentioning

confidence: 87%

“…The co-doping approach has yielded films with resistivities in the literature of ca. 10 -4 Ω cm [38][39][40][41][42][43] and optical transparencies above 80 % [42][43][44] for thin films (deposited by magnetron sputtering). Whilst showing promise for TCO applications, AGZO has received relatively little attention in the literature compared to singularly doped AZO and GZO.…”

Section: Introductionmentioning

confidence: 99%

High-Throughput Continuous Hydrothermal Synthesis of Transparent Conducting Aluminum and Gallium Co-doped Zinc Oxides

et al. 2017

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High-throughput continuous hydrothermal flow synthesis was used to generate a library of aluminum and gallium-codoped zinc oxide nanoparticles of specific atomic ratios. Resistivities of the materials were determined by Hall Effect measurements on heat-treated pressed discs and the results collated into a conductivity-composition map. Optimal resistivities of ∼9 × 10 Ω cm were reproducibly achieved for several samples, for example, codoped ZnO with 2 at% Ga and 1 at% Al. The optimum sample on balance of performance and cost was deemed to be ZnO codoped with 3 at% Al and 1 at% Ga.

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“…Co-doping of ZnO with Al 3+ and Ga 3+ ions has been also studied as way for increasing the dopant solubility and increasing the carrier mobility. In this sense, enhanced electronic and defect properties of ZnO were observed by co-doping of Al and Ga respect to the values obtained with the individual doping with of Al or Ga [13,14].…”

Section: Introductionmentioning

confidence: 84%

Structure and activity of Cu/ZnO catalysts co-modified with aluminium and gallium for methanol synthesis

et al. 2020

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This contribution describes the modification in the structure and activity of Cu/ZnO catalyst in the methanol synthesis reaction induced by the co-modification with a low amount of Al and Ga (Al + Ga = 3% atom). To elucidate the effect of the co-modification, the catalysts were characterized by means of variety of techniques (XRD, N2 physisorption, FTIR, TGA, TEM, TPR and N2O chemisorption) and tested in the methanol synthesis reaction carried out in a flow reactor at 250 °C and total pressure of 3 MPa using syngas. The combined characterization and activity tests demonstrated that the co-doping with Al and Ga affects the structure and activity of Cu/ZnO catalysts in a different manner depending on the Al/Ga ratio used. The best catalyst co-loaded with Ga and Al in equal amount shows an improvement in the activity for methanol synthesis respect to the activity obtained on catalysts individually loaded with Al and Ga. The difference in the activity of the samples co-loaded with Al and Ga normalized by N2O chemisorption point to a different participation of the copper surfaces in combination with the defect sites of ZnO depending on the Al and Ga loading.

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Effects of substrate temperature on the structural, morphological, electrical and optical properties of Al and Ga co-doped ZnO thin films grown by DC magnetron sputtering

Cited by 45 publications

References 20 publications

Interpreting the conductive atomic force microscopy measured inhomogeneous nanoscale surface electrical properties of Al-doped ZnO films

Interpreting the conductive atomic force microscopy measured inhomogeneous nanoscale surface electrical properties of Al-doped ZnO films

High-Throughput Continuous Hydrothermal Synthesis of Transparent Conducting Aluminum and Gallium Co-doped Zinc Oxides

Structure and activity of Cu/ZnO catalysts co-modified with aluminium and gallium for methanol synthesis

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